Specific Process Knowledge/Characterization/Probe station - Revision history

Mmat: /* Probe Station */

2025-05-27T17:47:00Z

Probe Station

← Older revision		Revision as of 19:47, 27 May 2025
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	Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.		Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.


			The user manual, technical information and contact information can be found in
			[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=343 '''Labmanager]'''.


	==Performance and Process Parameters==		==Performance and Process Parameters==

Mmat: /* Performance and Process Parameters */

2025-05-27T17:46:43Z

Performance and Process Parameters

← Older revision		Revision as of 19:46, 27 May 2025
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	\|-		\|-
	\|}		\|}


	~~The user manual, technical information and contact information can be found in~~
	~~[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=343 '''Labmanager]'''.~~

Mmat: /* Performance and Process Parameters */

2025-05-27T17:46:33Z

Performance and Process Parameters

← Older revision		Revision as of 19:46, 27 May 2025
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			The user manual, technical information and contact information can be found in
			[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=343 '''Labmanager]'''.
	~~'''~~The user manual, technical information and contact information can be found in ~~LabManager:'''~~

	~~'''~~[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=343 ~~Probe station~~]'''

Mmat: /* Equipment performance and process related parameters */

2025-05-27T17:46:02Z

Equipment performance and process related parameters

← Older revision		Revision as of 19:46, 27 May 2025
Line 13:		Line 13:
	Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.		Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.

	==~~Equipment performance~~ and ~~process related parameters~~==		==Performance and Process Parameters==

	{\| border="2" cellspacing="2" cellpadding="3"		{\| border="2" cellspacing="2" cellpadding="3"

Mmat at 17:45, 27 May 2025

2025-05-27T17:45:41Z

← Older revision		Revision as of 19:45, 27 May 2025
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	~~'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''~~		{{cc-nanolab}}

	'''~~All links~~ to ~~Kemibrug (SDS) and Labmanager Including APV and QC requires login~~.'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_station click here]'''
			<br>
	==Probe ~~station=~~=		<br>
			=Probe Station=
	[[Image:probe2.jpg\|thumb\|300x300px\|Probe station. Positioned in serviceroom CX1]]		[[Image:probe2.jpg\|thumb\|300x300px\|Probe station. Positioned in serviceroom CX1]]

	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_station click here]'''

	The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.		The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.

Rkch at 14:29, 6 February 2023

2023-02-06T14:29:46Z

← Older revision		Revision as of 16:29, 6 February 2023
Line 1:		Line 1:
			'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''

			'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.'''

	==Probe station==		==Probe station==
	[[Image:probe2.jpg\|thumb\|300x300px\|Probe station. Positioned in serviceroom CX1]]		[[Image:probe2.jpg\|thumb\|300x300px\|Probe station. Positioned in serviceroom CX1]]

Bghe at 06:48, 18 March 2020

2020-03-18T06:48:42Z

← Older revision		Revision as of 08:48, 18 March 2020
Line 2:		Line 2:
	[[Image:probe2.jpg\|thumb\|300x300px\|Probe station. Positioned in serviceroom CX1]]		[[Image:probe2.jpg\|thumb\|300x300px\|Probe station. Positioned in serviceroom CX1]]

	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.~~danchip~~.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_station click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_station click here]'''

	The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.		The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.

Bghe at 06:45, 18 March 2020

2020-03-18T06:45:18Z

← Older revision		Revision as of 08:45, 18 March 2020
Line 2:		Line 2:
	[[Image:probe2.jpg\|thumb\|300x300px\|Probe station. Positioned in serviceroom CX1]]		[[Image:probe2.jpg\|thumb\|300x300px\|Probe station. Positioned in serviceroom CX1]]

	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/~~Probe_Station~~ click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_station click here]'''

	The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.		The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.

Rkch: /* Equipment performance and process related parameters */

2017-09-21T11:23:30Z

Equipment performance and process related parameters

← Older revision		Revision as of 13:23, 21 September 2017
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	*I/V		*I/V
	*Resistance		*Resistance
	*Data collection by PC		*Data collection by PC possible
	\|-		\|-
	!style="background:silver; color:black" align="center"\|		!style="background:silver; color:black" align="center"\|

Rkch: /* Probe station */

2017-09-21T11:23:08Z

Probe station

← Older revision		Revision as of 13:23, 21 September 2017
Line 4:		Line 4:
	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_Station click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_Station click here]'''

	The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc~~, it~~ has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected.		The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.

	~~It has several~~ source meters~~, multi meters~~ and a ~~computer attached~~.		Samples can be inspected by either a microscope and/or a camera.

			Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.

	==Equipment performance and process related parameters==		==Equipment performance and process related parameters==