Specific Process Knowledge/Characterization/Optical characterization - Revision history

Bghe: /* Filmtek 4000 */

2025-09-02T12:36:35Z

Filmtek 4000

← Older revision		Revision as of 14:36, 2 September 2025
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	==Filmtek 4000==		==Filmtek 4000==
	{{CC-bghe2}}		{{CC-bghe2}}
	[[image:Filmtek.JPG\|275x275px\|right\|thumb\|FilmTek 4000: positioned in cleanroom A-1, {{photo1}}]]		[[image:Filmtek.JPG\|275x275px\|right\|thumb\|FilmTek 4000: positioned in cleanroom D-1, {{photo1}}]]
	FilmTek 4000 is a computerized film thickness measurement and material characterization system. This system combines fiber-optic spectrophotometry with advanced material modeling software to provide an affordable and reliable tool for the simultaneous measurement of film thickness, index of refraction, and extinction coefficient		FilmTek 4000 is a computerized film thickness measurement and material characterization system. This system combines fiber-optic spectrophotometry with advanced material modeling software to provide an affordable and reliable tool for the simultaneous measurement of film thickness, index of refraction, and extinction coefficient

Bghe: /* A rough overview of the performance of the Ellipsometers */

2025-09-02T12:36:10Z

A rough overview of the performance of the Ellipsometers

← Older revision		Revision as of 14:36, 2 September 2025
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	*No mapping facility		*No mapping facility
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Accessories		!style="background:silver; color:black" align="center" valign="center" rowspan="3"\|Accessories
	\|style="background:LightGrey; color:black"\|Focusing optics		\|style="background:LightGrey; color:black"\|Focusing optics
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|

Bghe: /* A rough overview of the performance of the Ellipsometers */

2025-09-02T12:34:47Z

A rough overview of the performance of the Ellipsometers

← Older revision		Revision as of 14:34, 2 September 2025
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	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Base for ex-situ measurements, transmission data can be done by holding the sample up against the detector		*Base for ex-situ measurements, transmission data can be done by holding the sample up against the detector
			\|-
			\|style="background:LightGrey; color:black"\|Heating stage
			\|style="background:WhiteSmoke; color:black"\|
			*Heating stage for measurements at temperatures up to 300C
			\|style="background:WhiteSmoke; color:black"\|
			*None
			\|style="background:WhiteSmoke; color:black"\|
			*None
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Substrates		!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Substrates

Bghe: /* A rough overview of the performance of the Ellipsometers */

2025-09-02T12:32:28Z

A rough overview of the performance of the Ellipsometers

← Older revision		Revision as of 14:32, 2 September 2025
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	!colspan="2" border="none" style="background:silver; color:black;" align="center"\|Equipment		!colspan="2" border="none" style="background:silver; color:black;" align="center"\|Equipment
			\|style="background:WhiteSmoke; color:black"\|<b>Ellipsometer RC2</b>
	\|style="background:WhiteSmoke; color:black"\|<b>Ellipsometer VASE (M2000XI)</b>		\|style="background:WhiteSmoke; color:black"\|<b>Ellipsometer VASE (M2000XI)</b>
	\|style="background:WhiteSmoke; color:black"\|<b>Ellipsometer M-2000V</b>		\|style="background:WhiteSmoke; color:black"\|<b>Ellipsometer M-2000V</b>
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	!style="background:silver; color:black;" align="center" width="60"\|Purpose		!style="background:silver; color:black;" align="center" width="60"\|Purpose
	\|style="background:LightGrey; color:black"\|		\|style="background:LightGrey; color:black"\|
			\|style="background:WhiteSmoke; color:black"\|
			*Measure thinfilm thicknesses and optical constants for single and multilayer optical transparent thinfilms.
			*Measure opticals constants for bulk material.
			*Measure thinfilm thicknesses and optical constants at elevated temperature <300C
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Measure thinfilm thicknesses and optical constants for single and multilayer optical transparent thinfilms.		*Measure thinfilm thicknesses and optical constants for single and multilayer optical transparent thinfilms.
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	!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Performance		!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Performance
	\|style="background:LightGrey; color:black"\|Films that can be examined		\|style="background:LightGrey; color:black"\|Films that can be examined
			\|style="background:WhiteSmoke; color:black"\|
			Any film that is transparent to the light in the given wavelength range
			e.g.:
			*Silicon Oxide
			*Silicon nitride
			*PolySilicon
			*Resists
			*Polymers
			*Very thin layers of metals
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	Any film that is transparent to the light in the given wavelength range		Any film that is transparent to the light in the given wavelength range
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	\|style="background:LightGrey; color:black"\|Film thickness range		\|style="background:LightGrey; color:black"\|Film thickness range
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*~20Å to ~~2 µm~~ (depending of the material)		*~20Å to a few micrometers (depending of the material)
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*~20Å to ~~2 µm~~ (depending of the material)		*~20Å to a few micrometers (depending of the material)
			\|style="background:WhiteSmoke; color:black"\|
			*~20Å to a few micrometer (depending of the material)
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="4"\|Process parameter range		!style="background:silver; color:black" align="center" valign="center" rowspan="4"\|Process parameter range
	\|style="background:LightGrey; color:black"\|Wavelength range		\|style="background:LightGrey; color:black"\|Wavelength range
			\|style="background:WhiteSmoke; color:black"\|
			*210nm-1690nm
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*210nm-1690nm		*210nm-1690nm
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	\|-		\|-
	\|style="background:LightGrey; color:black"\|Incident angle range		\|style="background:LightGrey; color:black"\|Incident angle range
			\|style="background:WhiteSmoke; color:black"\|
			*45-90 degrees
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*45-90 degrees		*45-90 degrees
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	\|-		\|-
	\|style="background:LightGrey; color:black"\|Beam size		\|style="background:LightGrey; color:black"\|Beam size
			\|style="background:WhiteSmoke; color:black"\|
			*3mm (spot size on sample depends on the angle)
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*2mm (spot size on sample depends on the angle)		*2mm (spot size on sample depends on the angle)
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	\|style="background:LightGrey; color:black"\|Mapping facility		\|style="background:LightGrey; color:black"\|Mapping facility
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Can make ~~wafermaps~~ on up to 150mm wafers		*Can make wafer maps on up to 150mm wafers
			\|style="background:WhiteSmoke; color:black"\|
			*Can make wafer maps on up to 150mm wafers
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*No mapping facility		*No mapping facility
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	!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Accessories		!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Accessories
	\|style="background:LightGrey; color:black"\|Focusing optics		\|style="background:LightGrey; color:black"\|Focusing optics
			\|style="background:WhiteSmoke; color:black"\|
			*Focus lenses can be applied, reduces the beam diameter to 120µm
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Focus lenses can be applied, reduces the beam diameter to 125µm		*Focus lenses can be applied, reduces the beam diameter to 125µm
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	*Extra stage for transmission measurements		*Extra stage for transmission measurements
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Base for ex-situ measurements, transmission data can be done by holding the sample up ~~agains~~ the detector		*Extra stage for transmission measurements
			\|style="background:WhiteSmoke; color:black"\|
			*Base for ex-situ measurements, transmission data can be done by holding the sample up against the detector
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Substrates		!style="background:silver; color:black" align="center" valign="center" rowspan="2"\|Substrates
	\|style="background:LightGrey; color:black"\|Batch size		\|style="background:LightGrey; color:black"\|Batch size
			\|style="background:WhiteSmoke; color:black"\|
			*One sample at a time smaller than 150mm (ask if you have anything larger)
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*One sample at a time smaller than 150mm (ask if you have anything larger)		*One sample at a time smaller than 150mm (ask if you have anything larger)
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	*Any material that does not leave residuals on the stage and that does not evaporate		*Any material that does not leave residuals on the stage and that does not evaporate
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*Any material that may go into the ~~Sputter~~ system ~~Lesker~~		*Any material that does not leave residuals on the stage and that does not evaporate
			\|style="background:WhiteSmoke; color:black"\|
			*Any material that may go into the ALD2 (when mounted on that system)
	\|-		\|-
	\|}		\|}

Bghe: /* Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V */

2025-09-02T12:24:04Z

Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V

← Older revision		Revision as of 14:24, 2 September 2025
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	<!-- give the link to the equipment info page in LabManager: -->		<!-- give the link to the equipment info page in LabManager: -->
	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=~~169~~ LabManager page for Ellipsometer RC2] <br/>		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=542 LabManager page for Ellipsometer RC2] <br/>
	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=316 LabManager page for Ellipsometer VASE] <br/>		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=316 LabManager page for Ellipsometer VASE] <br/>
	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=261 LabManager page for Ellipsometer M-2000V]		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=261 LabManager page for Ellipsometer M-2000V]

Bghe: /* Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V */

2025-09-02T12:21:56Z

Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V

← Older revision		Revision as of 14:21, 2 September 2025
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	<!-- give the link to the equipment info page in LabManager: -->		<!-- give the link to the equipment info page in LabManager: -->
			[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=169 LabManager page for Ellipsometer RC2] <br/>
	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=316 LabManager page for Ellipsometer VASE] <br/>		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=316 LabManager page for Ellipsometer VASE] <br/>
	[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=261 LabManager page for Ellipsometer M-2000V]		[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=261 LabManager page for Ellipsometer M-2000V]

Bghe: /* Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V */

2025-09-02T12:17:38Z

Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V

← Older revision		Revision as of 14:17, 2 September 2025
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	==Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V ==		==Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V ==
	''This section is written by Berit Herstrøm @ DTU Nanolab''		''This section is written by Berit Herstrøm @ DTU Nanolab''
			[[image:RC2 system.jpg\|275x275px\|right\|thumb\|Ellipsometer RC2: positioned in cleanroom A-1, {{photo1}}]]
	[[image:Ellipsometer_VASE_image.JPG\|275x275px\|right\|thumb\|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]]		[[image:Ellipsometer_VASE_image.JPG\|275x275px\|right\|thumb\|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]]

Bghe: /* Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V */

2025-09-02T12:13:22Z

Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V

← Older revision		Revision as of 14:13, 2 September 2025
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	[[image:Ellipsometer_VASE_image.JPG\|275x275px\|right\|thumb\|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]]		[[image:Ellipsometer_VASE_image.JPG\|275x275px\|right\|thumb\|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]]

	The ellipsometer VASE is actually a M2000XI-210 ellipsometer from J.A. Woollam Co., Inc.. We call it VASE (Variable Angle Spectroscopic Ellipsometry) because it can do spectroscopic ellipsometry at variable angles. <br/>		The ellipsometer RC2 from J.A. Woollam Co., Inc is the newest of our ellipsometers. It performs slightly better then the M2000 and can measure the full Müller matrix. For most users the differences are very small. The ellipsometer VASE is actually a M2000XI-210 ellipsometer from J.A. Woollam Co., Inc.. We call it VASE (Variable Angle Spectroscopic Ellipsometry) because it can do spectroscopic ellipsometry at variable angles. <br/>
	The ellipsometer M2000V is an in-situ ellipsometer from J.A. Wollam Co., Inc. This dedicated for being used on the Sputter System Lesker instrument or the ALD2 for in-situ measurements. When it is not on any system it is positioned next to the ALD2.		The ellipsometer M2000V is an in-situ ellipsometer from J.A. Wollam Co., Inc. This dedicated for being used on the Sputter System Lesker instrument or the ALD2 for in-situ measurements. When it is not on any system it is positioned next to the ALD2.

Bghe: /* Ellipsometer VASE and Ellipsometer M-2000V */

2025-09-02T12:08:27Z

Ellipsometer VASE and Ellipsometer M-2000V

← Older revision		Revision as of 14:08, 2 September 2025
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	For comparison of the methods for measuring optical constants and film thickness, see here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films\|Film thickness and optical constants of optical transparent films]]		For comparison of the methods for measuring optical constants and film thickness, see here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films\|Film thickness and optical constants of optical transparent films]]

	==Ellipsometer VASE and Ellipsometer M-2000V ==		==Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V ==
	''This section is written by Berit Herstrøm @ DTU Nanolab''		''This section is written by Berit Herstrøm @ DTU Nanolab''
	[[image:Ellipsometer_VASE_image.JPG\|275x275px\|right\|thumb\|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]]		[[image:Ellipsometer_VASE_image.JPG\|275x275px\|right\|thumb\|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]]

Bghe at 09:50, 6 August 2025

2025-08-06T09:50:55Z

← Older revision		Revision as of 11:50, 6 August 2025
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	==Ellipsometer VASE and Ellipsometer M-2000V ==		==Ellipsometer VASE and Ellipsometer M-2000V ==
	''This section is written by Berit Herstrøm @ DTU Nanolab''		''This section is written by Berit Herstrøm @ DTU Nanolab''
	[[image:Ellipsometer_VASE_image.JPG\|275x275px\|right\|thumb\|Ellipsometer VASE: positioned in cleanroom A-1, {{photo1}}]]		[[image:Ellipsometer_VASE_image.JPG\|275x275px\|right\|thumb\|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]]

	The ellipsometer VASE is actually a M2000XI-210 ellipsometer from J.A. Woollam Co., Inc.. We call it VASE (Variable Angle Spectroscopic Ellipsometry) because it can do spectroscopic ellipsometry at variable angles. <br/>		The ellipsometer VASE is actually a M2000XI-210 ellipsometer from J.A. Woollam Co., Inc.. We call it VASE (Variable Angle Spectroscopic Ellipsometry) because it can do spectroscopic ellipsometry at variable angles. <br/>