Specific Process Knowledge/Characterization/Hardness measurement - Revision history

Mmat at 13:26, 9 August 2025

2025-08-09T13:26:45Z

← Older revision		Revision as of 15:26, 9 August 2025
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	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''		=Hardness tester=

	~~''This page is written by DTU Nanolab internal''~~

	==Hardness tester==
	[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]		[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]

Pevo at 11:50, 6 February 2023

2023-02-06T11:50:42Z

← Older revision		Revision as of 13:50, 6 February 2023
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	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''

			''This page is written by DTU Nanolab internal''

	==Hardness tester==		==Hardness tester==

Choi: /* Hardness tester */

2018-02-06T11:58:47Z

Hardness tester

← Older revision		Revision as of 13:58, 6 February 2018
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	[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]		[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]

	The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably.		The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably. Also, the samples must be planar and without large protruding features.

Choi: /* Hardness tester */

2018-02-06T11:56:41Z

Hardness tester

← Older revision		Revision as of 13:56, 6 February 2018
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	[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]		[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]

	The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the ~~roughness~~ reliably.		The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably.

Choi: /* THIS PAGE IS UNDER CONSTRUCTION200px */

2018-02-06T10:01:56Z

THIS PAGE IS UNDER CONSTRUCTION200px

← Older revision		Revision as of 12:01, 6 February 2018
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	~~=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png\|200px]]=~~
	'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''		'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''

Choi: /* Quality Control - Recipe Parameters and Limits */

2018-02-01T13:58:18Z

Quality Control - Recipe Parameters and Limits

← Older revision		Revision as of 15:58, 1 February 2018
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	\|		\|
	There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated ~~using a test force of~~ 1 kgf and an indentation time ~~of 10 sec~~.		There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated externally at 1 kgf indentation force and 10 sec indentation time.
	\|}		\|}

Choi: /* Hardness tester */

2018-02-01T13:56:39Z

Hardness tester

← Older revision		Revision as of 15:56, 1 February 2018
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	[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]		[[Image:InnovaHardness.jpg\|thumb\|300x300px\|Hardness tester. Positioned in cleanroom F-2]]

	The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the roughness reliably.		The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the roughness reliably.

Choi: /* Equipment performance and process related parameters */

2018-02-01T09:27:32Z

Equipment performance and process related parameters

← Older revision		Revision as of 11:27, 1 February 2018
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	Calibration samples available		Calibration samples available
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|
	*277 HV		*277 HV 1
	*464 HV		*464 HV 1
	*704 HV		*704 HV 1
	\|-		\|-
	\|}		\|}

Choi: /* Quality Control - Recipe Parameters and Limits */

2018-01-29T14:44:42Z

Quality Control - Recipe Parameters and Limits

← Older revision		Revision as of 16:44, 29 January 2018
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	\|		\|
	There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated using 1 kgf ~~test force~~ and 10 sec ~~indentation time~~.		There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated using a test force of 1 kgf and an indentation time of 10 sec.
	\|}		\|}

Choi: /* Quality Control - Recipe Parameters and Limits */

2018-01-29T14:43:58Z

Quality Control - Recipe Parameters and Limits

← Older revision		Revision as of 16:43, 29 January 2018
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	\|		\|
	There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. ~~The~~ have been calibrated using 1 kgf test force and 10 sec indentation time.		There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated using 1 kgf test force and 10 sec indentation time.
	\|}		\|}