Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy - Revision history

Runku: /* An overview of the performance of the AFM Icon */ then -> than

2025-08-27T13:56:15Z

An overview of the performance of the AFM Icon: then -> than

← Older revision		Revision as of 15:56, 27 August 2025
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	\|style="background:silver; color:black"\|		\|style="background:silver; color:black"\|
	\|style="background:LightGrey; color:black"\|[[#Height Accuracy\|Height (z) accuracy]]		\|style="background:LightGrey; color:black"\|[[#Height Accuracy\|Height (z) accuracy]]
	\|style="background:WhiteSmoke; color:black"\|better than 2% (at 200 nm), typically better ~~then~~ 0.75%		\|style="background:WhiteSmoke; color:black"\|better than 2% (at 200 nm), typically better than 0.75%
	\|style="background:WhiteSmoke; color:black"\|better than 2% (at 200 nm), typically better ~~then~~ 0.75%		\|style="background:WhiteSmoke; color:black"\|better than 2% (at 200 nm), typically better than 0.75%
	\|-		\|-
	\|style="background:silver; color:black"\|		\|style="background:silver; color:black"\|

Jesyup: /* Tip status */

2025-04-03T09:50:20Z

Tip status

← Older revision		Revision as of 11:50, 3 April 2025
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	* Size: 1µm		* Size: 1µm
	* Scan Speed: 1Hz		* Scan Speed: 1Hz
			* Samples/line: 256
	\|		\|
	* Scan mode: PeakForce Tapping		* Scan mode: PeakForce Tapping
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	* Size: 1µm		* Size: 1µm
	* Scan Speed: 1Hz		* Scan Speed: 1Hz
			* Samples/line: 256
	\|-		\|-
	! Roughness information		! Roughness information

Jesyup: /* Tip Wear */ Minor Layout changes

2025-04-03T09:34:45Z

Tip Wear: Minor Layout changes

← Older revision		Revision as of 11:34, 3 April 2025
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	===Tip status===		===Tip status===
	''This section is written by Jesper Pan @DTU Nanolab		''This section is written by Jesper Pan @DTU Nanolab
	~~[[Image:section under construction.jpg\|150px]]~~

	When measuring a sample using an AFM, the resulting image is the convolution of the tip shape and sample shape.		When measuring a sample using an AFM, the resulting image is the convolution of the tip shape and sample shape.
	As the tip is ~~worn~~, it will become less sharp, thus the resulting image ~~will look~~ blurry.		As the tip is used, it will become less sharp, thus the resulting image appear blurry.
	This effect is especially visible when imaging samples with sharp/edged features, and drastically change roughness parameters like R<sub>max</sub>, R<sub>q</sub> and R<sub>a</sub>. Therefore it is important to be able to identify a worn tip.		This effect is especially visible when imaging samples with sharp/edged features, and drastically change roughness parameters like R<sub>max</sub>, R<sub>q</sub> and R<sub>a</sub>. Therefore it is important to be able to identify a worn tip.

	The figure below shows a comparison of the [https://www.budgetsensors.com/sample-for-tip-evaluation-tipcheck ~~link~~ TipCheck sample].		The figure below shows a comparison of the [https://www.budgetsensors.com/sample-for-tip-evaluation-tipcheck TipCheck sample].
	The left image shows a worm tip scanning across a rough surface with sharp edges. Due to tip convolution you practically use the sample to measure the shape of the tip. In this case, the tip is an oval pointing towards the top left, which causes all features to look like that. Furthermore, the worn tip is too big to reach bottom of the trenches between the structures. Which result in a lower measured roughness and Z-range.		The left image shows a worm tip scanning across a rough surface with sharp edges. Due to tip convolution you practically use the sample to measure the shape of the tip. In this case, the tip is an oval pointing towards the top left, which causes all features to look like that. Furthermore, the worn tip is too big to reach bottom of the trenches between the structures. Which result in a lower measured roughness and Z-range.

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	\| [[File:AFMNewTip.jpg\|thumb\|left\|alt=Image taken using a new probe\| AFM image of the tip checker sample taken using a new AFM probe]]		\| [[File:AFMNewTip.jpg\|thumb\|left\|alt=Image taken using a new probe\| AFM image of the tip checker sample taken using a new AFM probe]]
	\|-		\|-
	! Image Parameters ~~and~~		! Image Parameters
	~~Roughness information~~
	\|		\|
	* Scan mode: PeakForce Tapping		* Scan mode: PeakForce Tapping
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	* Size: 1µm		* Size: 1µm
	* Scan Speed: 1Hz		* Scan Speed: 1Hz
	~~----~~
	* R<sub>q</sub>: 2.49 nm
	* R<sub>a</sub>: 1.97 nm
	* R<sub>max</sub>: 18.8 nm
	\|		\|
	* Scan mode: PeakForce Tapping		* Scan mode: PeakForce Tapping
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	* Size: 1µm		* Size: 1µm
	* Scan Speed: 1Hz		* Scan Speed: 1Hz
	-~~---~~		\|-
			! Roughness information
			\|
			* R<sub>q</sub>: 2.49 nm
			* R<sub>a</sub>: 1.97 nm
			* R<sub>max</sub>: 18.8 nm
			\|
	* R<sub>q</sub>: 10.5 nm		* R<sub>q</sub>: 10.5 nm
	* R<sub>a</sub>: 8.45 nm		* R<sub>a</sub>: 8.45 nm
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	\| Same sample taken with a new probe. The triangular structures are pointing in different directions. Higher measured roughness as the sharper tip can map the trenches between the triangles.		\| Same sample taken with a new probe. The triangular structures are pointing in different directions. Higher measured roughness as the sharper tip can map the trenches between the triangles.
	\|}		\|}



	~~===Tip Wear===~~
	~~''This section is written by Jesper Pan @DTU Nanolab~~
	~~[[Image:section under construction.jpg\|150px]]~~
	~~Section about degradation of the tip as you continue scanning~~

Jesyup at 10:38, 6 February 2024

2024-02-06T10:38:33Z

← Older revision		Revision as of 12:38, 6 February 2024
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	As the tip is worn, it will become less sharp, thus the resulting image will look blurry.		As the tip is worn, it will become less sharp, thus the resulting image will look blurry.
	This effect is especially visible when imaging samples with sharp/edged features, and drastically change roughness parameters like R<sub>max</sub>, R<sub>q</sub> and R<sub>a</sub>. Therefore it is important to be able to identify a worn tip.		This effect is especially visible when imaging samples with sharp/edged features, and drastically change roughness parameters like R<sub>max</sub>, R<sub>q</sub> and R<sub>a</sub>. Therefore it is important to be able to identify a worn tip.

			The figure below shows a comparison of the [https://www.budgetsensors.com/sample-for-tip-evaluation-tipcheck link TipCheck sample].
			The left image shows a worm tip scanning across a rough surface with sharp edges. Due to tip convolution you practically use the sample to measure the shape of the tip. In this case, the tip is an oval pointing towards the top left, which causes all features to look like that. Furthermore, the worn tip is too big to reach bottom of the trenches between the structures. Which result in a lower measured roughness and Z-range.


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	\|-		\|-
	! Image		! Image
	\| [[File:AFMWornTip.jpg\|thumb\|left\|alt=Image taken using a worn probe\| AFM image of the tip checker sample taken using a ~~wornAFM~~ probe]]		\| [[File:AFMWornTip.jpg\|thumb\|left\|alt=Image taken using a worn probe\| AFM image of the tip checker sample taken using a worn AFM probe]]
	\| [[File:AFMNewTip.jpg\|thumb\|left\|alt=Image taken using a new probe\| AFM image of the tip checker sample taken using a new AFM probe]]		\| [[File:AFMNewTip.jpg\|thumb\|left\|alt=Image taken using a new probe\| AFM image of the tip checker sample taken using a new AFM probe]]
	\|-		\|-
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	Roughness information		Roughness information
	\|		\|
			* Scan mode: PeakForce Tapping
			* Probe: Tap 150Al
	* Size: 1µm		* Size: 1µm
	* Scan Speed: 1Hz		* Scan Speed: 1Hz
			----
	* R<sub>q</sub>: 2.49 nm		* R<sub>q</sub>: 2.49 nm
	* R<sub>a</sub>: 1.97 nm		* R<sub>a</sub>: 1.97 nm
	* R<sub>max</sub>: 18.8 nm		* R<sub>max</sub>: 18.8 nm
	\|		\|
			* Scan mode: PeakForce Tapping
			* Probe: Tap 150Al
	* Size: 1µm		* Size: 1µm
	* Scan Speed: 1Hz		* Scan Speed: 1Hz
			----
	* R<sub>q</sub>: 10.5 nm		* R<sub>q</sub>: 10.5 nm
	* R<sub>a</sub>: 8.45 nm		* R<sub>a</sub>: 8.45 nm
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	! Comments		! Comments
	\| The shape of the probe causes all features to look like an oval pointing towards the top left of the image. Low measured roughness as the worn tip skates across the top of the triangles.		\| The shape of the probe causes all features to look like an oval pointing towards the top left of the image. Low measured roughness as the worn tip skates across the top of the triangles.
	\| Same sample taken with a new probe. The triangular structures are pointing in different directions~~, as expected based on SEM image~~. Higher measured roughness as the sharper tip can map the trenches between the triangles.		\| Same sample taken with a new probe. The triangular structures are pointing in different directions. Higher measured roughness as the sharper tip can map the trenches between the triangles.
	\|}		\|}

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	''This section is written by Jesper Pan @DTU Nanolab		''This section is written by Jesper Pan @DTU Nanolab
	[[Image:section under construction.jpg\|150px]]		[[Image:section under construction.jpg\|150px]]
			Section about degradation of the tip as you continue scanning

Jesyup at 12:19, 1 February 2024

2024-02-01T12:19:58Z

← Older revision		Revision as of 14:19, 1 February 2024
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	{\| class="wikitable" style="max-width:~~1100px~~"		{\| class="wikitable" style="max-width:800px"
	\|+ Comparison between images of the Tip Checker sample		\|+ Comparison between images of the Tip Checker sample
	\|-		\|-
	! ~~!! SEM Image~~ !! Worn Probe !! New probe		! !! Worn Probe !! New probe
	\|-		\|-
	! Image		! Image
	~~\| [[File:AFMWornTip.jpg\|thumb\|left\|alt=SEM image of Tip checker sample\| SEM image of the tip checker sample (placeholder)]]~~
	\| [[File:AFMWornTip.jpg\|thumb\|left\|alt=Image taken using a worn probe\| AFM image of the tip checker sample taken using a wornAFM probe]]		\| [[File:AFMWornTip.jpg\|thumb\|left\|alt=Image taken using a worn probe\| AFM image of the tip checker sample taken using a wornAFM probe]]
	\| [[File:AFMNewTip.jpg\|thumb\|left\|alt=Image taken using a new probe\| AFM image of the tip checker sample taken using a new AFM probe]]		\| [[File:AFMNewTip.jpg\|thumb\|left\|alt=Image taken using a new probe\| AFM image of the tip checker sample taken using a new AFM probe]]
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	! Image Parameters and		! Image Parameters and
	Roughness information		Roughness information
	\|
	* Acceleration voltage: 3kV
	* Detector: SE
	\|		\|
	* Size: 1µm		* Size: 1µm
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	\|-		\|-
	! Comments		! Comments
	~~\| Example~~
	\| The shape of the probe causes all features to look like an oval pointing towards the top left of the image. Low measured roughness as the worn tip skates across the top of the triangles.		\| The shape of the probe causes all features to look like an oval pointing towards the top left of the image. Low measured roughness as the worn tip skates across the top of the triangles.
	\| Same sample taken with a new probe. The triangular structures are pointing in different directions, as expected based on SEM image. Higher measured roughness as the sharper tip can map the trenches between the triangles.		\| Same sample taken with a new probe. The triangular structures are pointing in different directions, as expected based on SEM image. Higher measured roughness as the sharper tip can map the trenches between the triangles.

Jesyup at 12:00, 1 February 2024

2024-02-01T12:00:19Z

← Older revision		Revision as of 14:00, 1 February 2024
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	\| Same sample taken with a new probe. The triangular structures are pointing in different directions, as expected based on SEM image. Higher measured roughness as the sharper tip can map the trenches between the triangles.		\| Same sample taken with a new probe. The triangular structures are pointing in different directions, as expected based on SEM image. Higher measured roughness as the sharper tip can map the trenches between the triangles.
	\|}		\|}



			===Tip Wear===
			''This section is written by Jesper Pan @DTU Nanolab
			[[Image:section under construction.jpg\|150px]]

Jesyup at 15:55, 30 January 2024

2024-01-30T15:55:55Z

← Older revision		Revision as of 17:55, 30 January 2024
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	! Comments		! Comments
	\| Example		\| Example
	\| The shape of the probe causes all features to look like an oval pointing towards the top left of the image. Low measured roughness as the tip skates across the top of the ~~tips~~.		\| The shape of the probe causes all features to look like an oval pointing towards the top left of the image. Low measured roughness as the worn tip skates across the top of the triangles.
	\| Same sample taken with a new probe. The triangular structures are pointing in different directions, as expected based on SEM image. Higher measured roughness as the sharper tip can map the trenches between the ~~tips~~.		\| Same sample taken with a new probe. The triangular structures are pointing in different directions, as expected based on SEM image. Higher measured roughness as the sharper tip can map the trenches between the triangles.
	\|}		\|}

Jesyup at 15:54, 30 January 2024

2024-01-30T15:54:35Z

← Older revision		Revision as of 17:54, 30 January 2024
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	{\| class="wikitable"		{\| class="wikitable" style="max-width:1100px"
	\|+ ~~Caption text~~		\|+ Comparison between images of the Tip Checker sample
	\|-		\|-
	! !! SEM Image !! Worn Probe !! New probe		! !! SEM Image !! Worn Probe !! New probe
	\|-		\|-
	! Image		! Image
	\| SEM ~~Image~~ of tip checker (~~WIP~~)		\| [[File:AFMWornTip.jpg\|thumb\|left\|alt=SEM image of Tip checker sample\| SEM image of the tip checker sample (placeholder)]]
	\| [[File:AFMWornTip.jpg~~\|300px~~\|thumb\|left\|alt=Image taken using a worn probe\|AFM image of the tip checker sample taken using a ~~worn AFM~~ probe]]		\| [[File:AFMWornTip.jpg\|thumb\|left\|alt=Image taken using a worn probe\| AFM image of the tip checker sample taken using a wornAFM probe]]
	\| [[File:AFMNewTip.jpg~~\|300px~~\|thumb\|left\|alt=Image taken using a new probe\|AFM image of the tip checker sample taken using a ~~worn~~ AFM probe]]		\| [[File:AFMNewTip.jpg\|thumb\|left\|alt=Image taken using a new probe\| AFM image of the tip checker sample taken using a new AFM probe]]
	\|-		\|-
	! ~~Scan~~ Parameters and		! Image Parameters and
	Roughness information		Roughness information
	\| ~~Example~~		\|
			* Acceleration voltage: 3kV
			* Detector: SE
	\|		\|
	* Size: 1µm		* Size: 1µm
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	! Comments		! Comments
	\| Example		\| Example
	\| ~~Example~~		\| The shape of the probe causes all features to look like an oval pointing towards the top left of the image. Low measured roughness as the tip skates across the top of the tips.
	\| ~~Example~~		\| Same sample taken with a new probe. The triangular structures are pointing in different directions, as expected based on SEM image. Higher measured roughness as the sharper tip can map the trenches between the tips.
	\|}		\|}

Jesyup: Started section regarding tip status

2024-01-30T15:26:01Z

Started section regarding tip status

@@ Line 189: / Line 189: @@
 ===Height Accuracy===
-Heigh accuracy estimations in AFM measurements are complex and depends on the scale you are interested in. At sub nanometer scale or a few nanometers the height measurement may be affected by the properties of the cantilever tip, your sample material stiffness and the scanning force. These parameters are less important when measuring in the 100 nm range and above. At all scales calibration of the Z-piezo is important.
+Height accuracy estimations in AFM measurements are complex and depends on the scale you are interested in. At sub nanometer scale or a few nanometers the height measurement may be affected by the properties of the cantilever tip, your sample material stiffness and the scanning force. These parameters are less important when measuring in the 100 nm range and above. At all scales calibration of the Z-piezo is important.
 Here at DTU Nanolab we calibrate the Z-piezo with a certified sample that is approximately 200 nm in height. This sample height is given with an uncertainty that is calculated based on variation on the calibration sample and measurement uncertainties of the instrument used for certification. The uncertainty on the calibration sample is ≤ 1.5 nm. Following our QC procedure we accept an offset from the certified value of 2%. For a 200 nm sample this is 4 nm.  If we use the formula for combined uncertainties then the uncertainty is: 4.3 nm or 2.1%
 However when we check the value it is typically less then 1% off given a combined uncertainty of: 0.75%

Bghe: /* AFM Icon 1 & 2 */

2023-04-28T14:03:40Z

AFM Icon 1 & 2

← Older revision		Revision as of 16:03, 28 April 2023
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	You can find them here: [https://www.youtube.com/playlist?list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj link to training videos]		You can find them here: [https://www.youtube.com/playlist?list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj link to training videos]

	It is also recommanded to read ~~Brukers~~ presentation of contract mode, tapping mode and peak force tapping mode [https://labmanager.dtu.dk/view_binary.php?fileId=5383 click HERE - requires login]		It is also recommanded to read this presentation of contract mode, tapping mode and peak force tapping mode [https://labmanager.dtu.dk/view_binary.php?fileId=5383 click HERE - requires login]

← Older revision		Revision as of 15:56, 27 August 2025
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	\|style="background:silver; color:black"\|		\|style="background:silver; color:black"\|
	\|style="background:LightGrey; color:black"\|[[#Height Accuracy\|Height (z) accuracy]]		\|style="background:LightGrey; color:black"\|[[#Height Accuracy\|Height (z) accuracy]]
	\|style="background:WhiteSmoke; color:black"\|better than 2% (at 200 nm), typically better ~~then~~ 0.75%		\|style="background:WhiteSmoke; color:black"\|better than 2% (at 200 nm), typically better than 0.75%
	\|style="background:WhiteSmoke; color:black"\|better than 2% (at 200 nm), typically better ~~then~~ 0.75%		\|style="background:WhiteSmoke; color:black"\|better than 2% (at 200 nm), typically better than 0.75%
	\|-		\|-
	\|style="background:silver; color:black"\|		\|style="background:silver; color:black"\|