Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence - Revision history

Mmat at 17:04, 27 May 2025

2025-05-27T17:04:56Z

← Older revision		Revision as of 19:04, 27 May 2025
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	~~'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''~~		{{cc-nanolab}}

	~~'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.'''~~

Rkch at 11:46, 6 February 2023

2023-02-06T11:46:46Z

← Older revision		Revision as of 13:46, 6 February 2023
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	~~== Fluence definition ==~~

	'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''		'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''

	'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.'''		'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.'''


			== Fluence definition ==

	The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>A</math>) and it is given in J/cm2.		The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>A</math>) and it is given in J/cm2.

Rkch at 11:46, 6 February 2023

2023-02-06T11:46:22Z

← Older revision		Revision as of 13:46, 6 February 2023
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	== Fluence definition ==		== Fluence definition ==

			'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''

			'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.'''

	The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>A</math>) and it is given in J/cm2.		The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>A</math>) and it is given in J/cm2.

Rkch: /* Fluence definition */

2022-08-08T14:21:41Z

Fluence definition

← Older revision		Revision as of 16:21, 8 August 2022
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	Where <math>\overline{P}</math> (average power) is measured with the laser sensor power measurement (see [http://labmanager.danchip.dtu.dk/d4Show.php?id=2885&mach=309\|laser manual],section 5.3) and the repetion rate (<math>f</math>) is set in the parameter file under " laser frequency".		Where <math>\overline{P}</math> (average power) is measured with the laser sensor power measurement (see [http://labmanager.danchip.dtu.dk/d4Show.php?id=2885&mach=309\|laser manual],section 5.3) and the repetion rate (<math>f</math>) is set in the parameter file under " laser frequency".

	The fluence is therefore determinated as such :		The fluence is therefore determinated as such:

Rkch: /* Fluence definition */

2018-08-16T09:36:41Z

Fluence definition

← Older revision		Revision as of 11:36, 16 August 2018
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	The function <math>E_{pulse}</math> is defined as :		The function <math>E_{pulse}</math> is defined as:

Chasil: /* Fluence results measurement */

2015-08-06T13:29:54Z

Fluence results measurement

← Older revision		Revision as of 15:29, 6 August 2015
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	![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]		![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]
	![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F103mm)]]		![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F103mm)]]
	~~![[image:060815_FluenceVSrepRate_355nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F255mm)]]~~
	\|}		\|}
	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"
			![[image:060815_FluenceVSrepRate_355nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F255mm)]]
	![[image:140618_FluenceVSrepRate_1064nm_IPG.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (IPG 1064nm, F255mm). The fluence at 100% and 10kHz must be expected around 25J/cm2]]		![[image:140618_FluenceVSrepRate_1064nm_IPG.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (IPG 1064nm, F255mm). The fluence at 100% and 10kHz must be expected around 25J/cm2]]

	\|}		\|}

Chasil at 13:29, 6 August 2015

2015-08-06T13:29:28Z

← Older revision		Revision as of 15:29, 6 August 2015
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	![[image:161214_FluenceVSrepRate_1064nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (1064nm, F255mm)]]		![[image:161214_FluenceVSrepRate_1064nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (1064nm, F255mm)]]
	![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]		![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]
	![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, ~~F100mm~~)]]		![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F103mm)]]
			![[image:060815_FluenceVSrepRate_355nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F255mm)]]
	\|}		\|}
	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"

Chasil at 13:44, 19 December 2014

2014-12-19T13:44:36Z

← Older revision		Revision as of 15:44, 19 December 2014
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	== Fluence results measurement==		== Fluence results measurement==

	The results below have been calculated with the theoretical spot size provided by 3D Micromac.		The results below have been calculated with the theoretical [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Spot size and optics\|spot size]] provided by 3D Micromac.

	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"

Chasil: /* Fluence results measurement */

2014-12-19T13:43:39Z

Fluence results measurement

← Older revision		Revision as of 15:43, 19 December 2014
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	== Fluence results measurement==		== Fluence results measurement==

			The results below have been calculated with the theoretical spot size provided by 3D Micromac.

	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"

Chasil: /* Fluence results measurement */

2014-12-19T13:42:39Z

Fluence results measurement

← Older revision		Revision as of 15:42, 19 December 2014
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	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"
	![[image:~~101014_FluenceVSrepRate_1064nm_255mm_v3~~.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (1064nm, F255mm)]]		![[image:161214_FluenceVSrepRate_1064nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (1064nm, F255mm)]]
	![[image:~~101014_FluenceVSrepRate_532nm_255mm_v3~~.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]		![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]
	![[image:~~101014_FluenceVSrepRate_355nm_255mm~~.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F100mm)]]		![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F100mm)]]
	\|}		\|}
	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"

← Older revision		Revision as of 15:29, 6 August 2015
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	![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]		![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]
	![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F103mm)]]		![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F103mm)]]
	~~![[image:060815_FluenceVSrepRate_355nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F255mm)]]~~
	\|}		\|}
	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"
			![[image:060815_FluenceVSrepRate_355nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F255mm)]]
	![[image:140618_FluenceVSrepRate_1064nm_IPG.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (IPG 1064nm, F255mm). The fluence at 100% and 10kHz must be expected around 25J/cm2]]		![[image:140618_FluenceVSrepRate_1064nm_IPG.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (IPG 1064nm, F255mm). The fluence at 100% and 10kHz must be expected around 25J/cm2]]

	\|}		\|}

← Older revision		Revision as of 15:29, 6 August 2015
Line 25:		Line 25:
	![[image:161214_FluenceVSrepRate_1064nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (1064nm, F255mm)]]		![[image:161214_FluenceVSrepRate_1064nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (1064nm, F255mm)]]
	![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]		![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]
	![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, ~~F100mm~~)]]		![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F103mm)]]
			![[image:060815_FluenceVSrepRate_355nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F255mm)]]
	\|}		\|}
	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"

← Older revision		Revision as of 15:42, 19 December 2014
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	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"
	![[image:~~101014_FluenceVSrepRate_1064nm_255mm_v3~~.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (1064nm, F255mm)]]		![[image:161214_FluenceVSrepRate_1064nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for IR wavelength (1064nm, F255mm)]]
	![[image:~~101014_FluenceVSrepRate_532nm_255mm_v3~~.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]		![[image:161214_FluenceVSrepRate_532nm_255mm.jpg\|500x500px\|thumb\|center\|Fluence result for green wavelength (532nm, F255mm)]]
	![[image:~~101014_FluenceVSrepRate_355nm_255mm~~.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F100mm)]]		![[image:161214_FluenceVSrepRate_355nm_103mm.jpg\|500x500px\|thumb\|center\|Fluence result for UV wavelength (355nm, F100mm)]]
	\|}		\|}
	{\| border="1" cellspacing="2" cellpadding="2"		{\| border="1" cellspacing="2" cellpadding="2"