Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1 - Revision history

Jmli at 09:58, 4 September 2025

2025-09-04T09:58:41Z

← Older revision		Revision as of 11:58, 4 September 2025
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Jmli at 10:34, 28 June 2023

2023-06-28T10:34:04Z

← Older revision		Revision as of 12:34, 28 June 2023
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Jmli at 06:50, 5 October 2020

2020-10-05T06:50:36Z

← Older revision		Revision as of 08:50, 5 October 2020
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			'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/isotropic/mediumiso1 click here]'''

	<!--Checked for updates on 30/7-2018 - ok/jmli -->		<!--Checked for updates on 30/7-2018 - ok/jmli -->
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Jmli at 11:51, 30 July 2018

2018-07-30T11:51:52Z

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	\|+ '''Process runs'''		\|+ '''Process runs'''
	\|-		\|-

Jmli at 11:51, 30 July 2018

2018-07-30T11:51:26Z

← Older revision		Revision as of 13:51, 30 July 2018
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	\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"		\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
	\|+ '''Process runs'''		\|+ '''Process runs'''

Jmli at 11:50, 30 July 2018

2018-07-30T11:50:49Z

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			\| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
	\|+ '''Process runs'''		\|+ '''Process runs'''
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Jmli: Created page with "{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="4" width="120"| Substrate Informati..."

2016-06-06T10:45:57Z

Created page with "{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="4" width="120"| Substrate Informati..."

New page

{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
|+ '''Process runs'''
|-
! rowspan="2" width="40"| Date
! colspan="4" width="120"| Substrate Information
! colspan="4" | Process Information
! rowspan="2" width="500" |SEM Images
|-
! width="30" | Wafer info
! width="40" | Mask
! width="40" | Material/ Exposed area
! width="40" | Tool / Operator
! width="40" | Conditioning
! width="40" | Recipe
! width="40" | Wafer ID
! width="40" | Comments
|-
| 9/4-2014
| 4"
| travka05 wafer 1.5 µm AZ
| Si / 5 %
| Pegasus/jmli
| 5 minute TDESC clean + MU runs
| jml/isotropic/mediumiso1 2:00 minutes
| S003961
|
|
[[file:S003961-01.jpg |120px|frameless ]]
[[file:S003961-02.jpg |120px|frameless ]]
[[file:S003961-03.jpg |120px|frameless ]]
[[file:S003961-04.jpg |120px|frameless ]]
[[file:S003961-05.jpg |120px|frameless ]]
|-
|}