LabAdviser/Technology Research/Microfabrication of X-ray optical elements - Revision history

Mmat at 14:49, 21 May 2025

2025-05-21T14:49:00Z

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	'''Feedback to this page''': '''[mailto:labadviser@~~danchip~~.dtu.dk?Subject=Feed%20back%20from%20page%~~20http://labadviser.danchip~~.dtu.dk/index.php/LabAdviser/Technology_Research/Microfabrication_of_X-ray_optical_elements click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20labadviser@nanolab.dtu.dk/index.php/LabAdviser/Technology_Research/Microfabrication_of_X-ray_optical_elements click here]'''

	=''Microfabrication of X-ray optical elements''=		=''Microfabrication of X-ray optical elements''=
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	==Project description==		==Project description==
	DTU Nanolab has been very active in development of microfabrication technology for a wide range of applications. Microfabrication technology for X-ray optical elements is rather challenging, but the potential in terms of applications is rapidly increasing. The present project aims at improving the microfabrication technology for X-ray optical elements as well as specifically realizing X-ray gratings for dark field X-ray imaging. The project was carried out at DTU Nanolab, with a close collaboration with DTU Physics and DMRI Teknologisk Institut.		DTU Nanolab has been very active in development of microfabrication technology for a wide range of applications. Microfabrication technology for X-ray optical elements is rather challenging, but the potential in terms of applications is rapidly increasing. The present project aims at improving the microfabrication technology for X-ray optical elements as well as specifically realizing X-ray gratings for dark field X-ray imaging. The project was carried out at DTU Nanolab, with a close collaboration with DTU Physics and DMRI Teknologisk Institut.
	Deep reactive ion etching (DRIE) of silicon has already proven to be a useful approach for fabrication of high performance refractive optical elements for shaping and focussing X-ray beams, as clearly demonstrated in a very successful previous PhD project (Frederik Stöhr) where DTU Physics, DTU Danchip and DTU Nanotech collaborated to produce excellent results. In this project we shall further improve the fabrication technology to enhance the aspect ratio of the etched structures and improve the side-wall morphology to enhance the performance of the optical elements.		Deep reactive ion etching (DRIE) of silicon has already proven to be a useful approach for fabrication of high performance refractive optical elements for shaping and focussing X-ray beams, as clearly demonstrated in a very successful previous PhD project (Frederik Stöhr) where DTU Physics, DTU Nanolab (former DTU Danchip) and DTU Nanotech collaborated to produce excellent results. In this project we shall further improve the fabrication technology to enhance the aspect ratio of the etched structures and improve the side-wall morphology to enhance the performance of the optical elements.
	The etched silicon structures may also be used as moulds for replication in other materials, and in this project technology for replication in materials with high X-ray absorption will be developed and used to produce high-contrast X-ray gratings, which will benefit from high aspect ratio structuring of silicon.		The etched silicon structures may also be used as moulds for replication in other materials, and in this project technology for replication in materials with high X-ray absorption will be developed and used to produce high-contrast X-ray gratings, which will benefit from high aspect ratio structuring of silicon.
	The X-ray gratings will be used in a Modular Dark Field Detector (MDD) system developed in collaboration with external partners: DMRI Teknologisk Institut, Niels Bohr Institutet, InnospeXion, X-Novo, FOSS and Tican. The system design, hardware and software will be provided by the external partners, while the PhD project is responsible for development and realization of a set of X-ray gratings that are key elements in the system. The purpose of the X-ray system is online detection of foreign bodies in food products, and in particular bodies that cannot be detected in conventional X-ray absorption systems for the same purpose, due to low X-ray contrast. Thus, the PhD project is partly funded by Innovationsfonden, while the remaining funding is covered by DTU Nanolab (formely : jointly by DTU Danchip and DTU Nanotech).		The X-ray gratings will be used in a Modular Dark Field Detector (MDD) system developed in collaboration with external partners: DMRI Teknologisk Institut, Niels Bohr Institutet, InnospeXion, X-Novo, FOSS and Tican. The system design, hardware and software will be provided by the external partners, while the PhD project is responsible for development and realization of a set of X-ray gratings that are key elements in the system. The purpose of the X-ray system is online detection of foreign bodies in food products, and in particular bodies that cannot be detected in conventional X-ray absorption systems for the same purpose, due to low X-ray contrast. Thus, the PhD project is partly funded by Innovationsfonden, while the remaining funding is covered by DTU Nanolab (formely : jointly by DTU Nanolab (former Danchip) and DTU Nanotech).
	In the PhD project we will also develop fabrication technology aimed at other X-ray optical elements. In addition, the targeted improvements in aspect ratio and surface morphology of etched silicon structures will greatly benefit also a wide range of other MEMS applications.		In the PhD project we will also develop fabrication technology aimed at other X-ray optical elements. In addition, the targeted improvements in aspect ratio and surface morphology of etched silicon structures will greatly benefit also a wide range of other MEMS applications.

Bghe: /* Microfabrication of X-ray optical elements */

2020-11-25T12:02:32Z

Microfabrication of X-ray optical elements

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	*'''Supervisors:''' Ole Hansen, Henri Jansen		*'''Supervisors:''' Ole Hansen, Henri Jansen
	*'''Partners involved:''' DTU Physics, Teknologiske Institut		*'''Partners involved:''' DTU Physics, Teknologiske Institut
	*'''Full thesis:'''		*'''Full thesis:''' https://orbit.dtu.dk/en/publications/microfabrication-technologies-of-x-ray-optical-elements

	==Project description==		==Project description==

Bghe: /* Microfabrication of X-ray optical elements */

2020-11-25T11:49:07Z

Microfabrication of X-ray optical elements

← Older revision		Revision as of 13:49, 25 November 2020
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	*'''Supervisors:''' Ole Hansen, Henri Jansen		*'''Supervisors:''' Ole Hansen, Henri Jansen
	*'''Partners involved:''' DTU Physics, Teknologiske Institut		*'''Partners involved:''' DTU Physics, Teknologiske Institut
			*'''Full thesis:'''

	==Project description==		==Project description==

Chasil: /* Fabrication process flows */

2020-02-28T14:38:34Z

Fabrication process flows

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	==Fabrication process flows ==		==Fabrication process flows ==

			This fabrication process flow has been used to fabricated linear and two-dimensional gold grating.

	Process flow for gold grating (pdf format):		Process flow for gold grating (pdf format):
	[[media:ProcessFlow_seed_layer.pdf\|Process flow gold grating]].		[[media:ProcessFlow_seed_layer.pdf\|Process flow gold grating]].

Chasil: /* Fabrication process flows */

2020-02-28T14:36:43Z

Fabrication process flows

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	==Fabrication process flows ==		==Fabrication process flows ==

	*Link Process flow(s) ~~relevant to this publication~~		Process flow for gold grating (pdf format):
	*Link(s) to Process ~~development made in connection to this publication this is decribes in either LabAdviser or Process2Share~~.		[[media:ProcessFlow_seed_layer.pdf\|Process flow gold grating]].

Chasil: /* Process flow fabrication */

2020-02-28T14:07:33Z

Process flow fabrication

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	: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]		: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]

	==~~Process flow fabrication~~ ==		==Fabrication process flows ==

	*Link Process flow(s) relevant to this publication		*Link Process flow(s) relevant to this publication
	*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.		*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.

Chasil: /* Process flow fabrication */

2020-02-28T14:07:16Z

Process flow fabrication

← Older revision		Revision as of 16:07, 28 February 2020
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	: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]		: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]

	===Process flow fabrication ===		==Process flow fabrication ==

	*Link Process flow(s) relevant to this publication		*Link Process flow(s) relevant to this publication
	*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.		*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.

Chasil: /* Publication as co-author */

2020-02-28T14:06:59Z

Publication as co-author

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	: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]		: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]

	===~~Publication as co-author~~===		===Process flow fabrication ===

	*Link Process flow(s) relevant to this publication		*Link Process flow(s) relevant to this publication
	*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.		*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.

Chasil: /* Publication as co-author */

2020-02-28T14:06:43Z

Publication as co-author

← Older revision		Revision as of 16:06, 28 February 2020
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	: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]		: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]

			===Publication as co-author===

	*Link Process flow(s) relevant to this publication		*Link Process flow(s) relevant to this publication
	*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.		*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.

Chasil: /* Name of publication3 made in this project */

2020-02-28T14:06:14Z

Name of publication3 made in this project

← Older revision		Revision as of 16:06, 28 February 2020
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	: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]		: ECS J. Solid State Sci Technology, 9,(2020), 024002, [https://doi.org/10.1149/2162-8777/ab61ed]

	~~===Name of publication3 made in this project===~~
	~~Reference and link to the publication~~

	*Link Process flow(s) relevant to this publication		*Link Process flow(s) relevant to this publication
	*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.		*Link(s) to Process development made in connection to this publication this is decribes in either LabAdviser or Process2Share.