LabAdviser/Courses/TPT Thin Film - Revision history

Mmat: /* Thin Film Tool Package Training */

2025-02-24T18:54:15Z

Thin Film Tool Package Training

← Older revision		Revision as of 20:54, 24 February 2025
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	== Thin Film Tool Package Training ==		== Thin Film Tool Package Training ==

	DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.		DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].
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Mmat: /* Knowledge and Information about Thin Film Techniques */

2025-02-12T13:18:58Z

Knowledge and Information about Thin Film Techniques

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	====Stress in Thin Films====		====Stress in Thin Films====
	*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]		*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
	*[https://www.bruker.com/fileadmin/~~user_upload~~/~~8-PDF-Docs~~/~~SurfaceAnalysis~~/~~StylusProfilometry~~/~~ApplicationNotes~~/~~AN516~~-~~Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P~~.pdf Dektak stress measurements]		*[https://www.bruker.com/en/meta/fileadmin/_jcr_content/root/contentpar/search.download-asset.pdf/2bbdadb5-98f9-4b72-9ad4-cfb3683fb2da/thin-film-stress-measurement-using-dektak-stylus-profilers-app-note-BRUKER.pdf Dektak stress measurements]
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Mmat: /* Thin Film Tool Package Training */

2025-02-12T13:16:17Z

Thin Film Tool Package Training

← Older revision		Revision as of 15:16, 12 February 2025
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	* Evgeniy Shkondin		* Evgeniy Shkondin
	<BR>		<BR>
	If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk ~~lithography~~@nanolab.dtu.dk].		If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk thinfilm@nanolab.dtu.dk].
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	==Knowledge and Information about Thin Film Techniques==		==Knowledge and Information about Thin Film Techniques==

Mmat at 13:15, 12 February 2025

2025-02-12T13:15:50Z

← Older revision		Revision as of 15:15, 12 February 2025
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	==~~=Material for preparations ''(see also DTU Learn)''=~~==		==Knowledge and Information about Thin Film Techniques==
	~~'''Literature:'''~~
	* [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes]

	~~==Presentations from the lectures==~~		====Introduction to Thin Films====

	~~<big>Slides from the 1<sup>st</sup> lecture</big>~~
	*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f See LabManager (requires a login)]
	~~<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->~~

	~~<big>Slides from the 2<sup>nd</sup> lecture</big>~~
	*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f See LabManager (requires a login)].
	~~<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->~~

	~~==Literature==~~

	~~Some literature about thin films can be found here (requires a login):~~

	====Introduction to ~~thin films~~====
	*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]		*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
	*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]		*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
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	*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]		*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]

	====Stress in ~~thin films~~====		====Stress in Thin Films====
	*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]		*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
	*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]		*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]
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Mmat: /* Thin Film Tool Package Training */

2025-02-12T13:13:09Z

Thin Film Tool Package Training

Show changes

Mmat: /* Thin Film Tool Package Training */

2025-02-12T13:02:21Z

Thin Film Tool Package Training

← Older revision		Revision as of 15:02, 12 February 2025
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	DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.		DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.
			<BR>
	The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.		<BR>
			The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here].
			<BR>
			<BR>
	'''Course Layout'''		'''Course Layout'''
	# Online lecture videos (theory)		# Online lecture videos (theory)
	# Quizzes for each section		# Quizzes for each section
	# Individual hands-on training (specific equipment)		# Individual hands-on training (specific equipment)
			<BR>
	''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''		''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
			<BR>
			<BR>
	'''Learning objectives'''		'''Learning objectives'''
	~~''Learn about the fundamentals of lithography processing in a cleanroom.''~~		<BR>
	* Understand different film deposition methods		* Understand different film deposition methods
	* Learn different thin film formation mechanisms		* Learn different thin film formation mechanisms
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	* compare and be able to understand appropriate thin film techniques		* compare and be able to understand appropriate thin film techniques
	* introduction to equipment at DTU Nanolab		* introduction to equipment at DTU Nanolab
			<BR>
	Course Contents		'''Course Contents'''
			<BR>
	* Introduction to Thin Film Techniques		* Introduction to Thin Film Techniques
	** Thin Film Formation		** ''Thin Film Formation''
	** Material Properties		** ''Material Properties''
	** Overview over Thin Film Techniques		** ''Overview over Thin Film Techniques''
	* Physical Vapour Deposition (PVD)		* Physical Vapour Deposition (PVD)
	** ''Introduction to PVD''		** ''Introduction to PVD''
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	* Chemical Vapor Deposition (CVD)		* Chemical Vapor Deposition (CVD)
	* Atomic Layer Deposition (ALD)		* Atomic Layer Deposition (ALD)
			<BR>
	Qualifying Prerequisites		'''Qualifying Prerequisites'''
			<BR>
	Cleanroom safety course at DTU Nanolab		* Cleanroom safety course at DTU Nanolab
	Admission to the cleanroom must be obtained before the group training session		* Admission to the cleanroom must be obtained before the group training session
			<BR>
	Course Responsible		'''Course Responsible'''
	* Pernille Voss Larsen		* Pernille Voss Larsen
	* Evgeniy Shkondin		* Evgeniy Shkondin
			<BR>
			If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk lithography@nanolab.dtu.dk].

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			<BR>

	~~If you have questions you can contact us via lithography@nanolab.dtu.dk.~~

Mmat at 12:54, 12 February 2025

2025-02-12T12:54:38Z

← Older revision		Revision as of 14:54, 12 February 2025
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	The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.		The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

	'''Course ~~Description~~'''		'''Course Layout'''
			# Online lecture videos (theory)
			# Quizzes for each section
			# Individual hands-on training (specific equipment)

			''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''

			'''Learning objectives'''
			''Learn about the fundamentals of lithography processing in a cleanroom.''
			* Understand different film deposition methods
			* Learn different thin film formation mechanisms
			* be aware of relevant materials properties
			* compare and be able to understand appropriate thin film techniques
			* introduction to equipment at DTU Nanolab

			Course Contents
	* Introduction to Thin Film Techniques		* Introduction to Thin Film Techniques
	** Thin Film Formation		** Thin Film Formation
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	* Chemical Vapor Deposition (CVD)		* Chemical Vapor Deposition (CVD)
	* Atomic Layer Deposition (ALD)		* Atomic Layer Deposition (ALD)
	*
	* '''Learning objectives''' ''Learn about the ~~fundamentals of lithography processing in a~~ cleanroom~~:''~~		Qualifying Prerequisites
	** ~~Understand different film deposition methods~~
	** Learn different thin film formation mechanisms		Cleanroom safety course at DTU Nanolab
	** be aware of relevant materials properties		Admission to the cleanroom must be obtained before the group training session
	** compare and be able to understand appropriate thin film techniques
	** introduction to equipment at DTU Nanolab		Course Responsible
			* Pernille Voss Larsen
			* Evgeniy Shkondin

			If you have questions you can contact us via lithography@nanolab.dtu.dk.






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Mmat at 12:16, 12 February 2025

2025-02-12T12:16:42Z

← Older revision		Revision as of 14:16, 12 February 2025
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	''~~'Feedback to~~ this page~~''': '''[mailto:labadviser@nanolab~~.~~dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'~~''		''The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.''

	''~~This~~ page ~~is written by DTU Nanolab internal~~''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''

	==Thin Film ~~TPT~~ ==		== Thin Film Tool Package Training ==

	DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition ~~techniques~~.		DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.

	~~Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to~~ sign up for the ~~lectures, before they apply for a training~~ (~~i.e. it is possible~~ to ~~get~~ a ~~training~~ and ~~then attend the lectures afterwards).~~		The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

			'''Course Description'''

			* Introduction to Thin Film Techniques
			** Thin Film Formation
			** Material Properties
			** Overview over Thin Film Techniques
			* Physical Vapour Deposition (PVD)
			** ''Introduction to PVD''
			** ''Resistive thermal evaporation''
			** ''E-beam Evaporation''
			** ''Sputtering''
			* Thermal Oxidation
			* Chemical Vapor Deposition (CVD)
			* Atomic Layer Deposition (ALD)
			*
			* '''Learning objectives''' ''Learn about the fundamentals of lithography processing in a cleanroom:''
			** Understand different film deposition methods
			** Learn different thin film formation mechanisms
			** be aware of relevant materials properties
			** compare and be able to understand appropriate thin film techniques
			** introduction to equipment at DTU Nanolab

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Pevo: /* Theoretical part */

2024-04-05T08:35:21Z

Theoretical part

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	<i>		<i>
	The next lecture will be held on the 17th of April 2024 from 10~~.00~~-12~~.00~~ The lecture will be held in room 011 in building 451.		The next lecture will be held on the 17th of April 2024 from 10-12 The lecture will be held in room 011 in building 451.

	Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.		Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.

Pevo: /* Theoretical part */

2024-04-05T08:34:55Z

Theoretical part

← Older revision		Revision as of 10:34, 5 April 2024
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	<i>		<i>
	The next lecture will be held on the 17th of April 2024 from 10.30-12. The lecture will be held in room 011 in building 451.		The next lecture will be held on the 17th of April 2024 from 10.00-12.00 The lecture will be held in room 011 in building 451.

	Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.		Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.