LabAdviser/Courses/TPT Dry Etch - Revision history

Mmat at 22:03, 24 February 2025

2025-02-24T22:03:46Z

← Older revision		Revision as of 00:03, 25 February 2025
Line 1:		Line 1:
			{{cc-nanolab}}

	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]'''

Mmat: /* Material for preparations and further information (see also DTU Learn) */

2025-02-12T13:08:51Z

Material for preparations and further information (see also DTU Learn)

← Older revision		Revision as of 15:08, 12 February 2025
Line 59:		Line 59:
	*Lecture powerpoint slide show [[:File:TPT Dry etching April2018.pptx]]		*Lecture powerpoint slide show [[:File:TPT Dry etching April2018.pptx]]
	-->		-->
	*Lecture slides with explanatory text included [https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=7&name=Lecture+Power+point+with+notes+dec+2020.pdf], ''~~requires~~ login''		*Lecture slides with explanatory text included [https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=7&name=Lecture+Power+point+with+notes+dec+2020.pdf] ''(login required)''

	\| style="width: 20%" valign="top"\|		\| style="width: 20%" valign="top"\|

Mmat at 12:56, 12 February 2025

2025-02-12T12:56:10Z

← Older revision		Revision as of 14:56, 12 February 2025
Line 3:		Line 3:
	==Dry Etch Tool Package Training==		==Dry Etch Tool Package Training==
	DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].		DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].
			<BR>
	<BR>		<BR>
	The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here].		The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here].

Mmat at 12:54, 12 February 2025

2025-02-12T12:54:06Z

Mmat at 12:51, 12 February 2025

2025-02-12T12:51:14Z

← Older revision		Revision as of 14:51, 12 February 2025
Line 7:		Line 7:
	The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here].		The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here].

	'''Course ~~Description~~'''		'''Course Layout'''

	# Online lecture videos (theory)		# Online lecture videos (theory)
Line 16:		Line 16:

	''The individual hands-on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''		''The individual hands-on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''



Line 25:		Line 26:
	* Tuning of the dry etch process		* Tuning of the dry etch process
	* Overview of the dry etch equipment at Nanolab		* Overview of the dry etch equipment at Nanolab


	After the course you will be able to		After the course you will be able to
Line 34:		Line 34:
	* Spot when the recipe needs to be tuned for his/her needs and		* Spot when the recipe needs to be tuned for his/her needs and
	* Suggest relevant tuning parameters		* Suggest relevant tuning parameters


	'''Qualifying Prerequisites'''		'''Qualifying Prerequisites'''
Line 40:		Line 39:
	* Cleanroom safety course at DTU Nanolab		* Cleanroom safety course at DTU Nanolab
	* Admission to the cleanroom must be obtained before the group training session		* Admission to the cleanroom must be obtained before the group training session


	'''Course Responsible'''		'''Course Responsible'''
	*Jonas Michael-Lindhard		*Jonas Michael-Lindhard
	*Berit Herstrøm		*Berit Herstrøm



	If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].		If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].


	<br clear="all" />		<br clear="all" />

Mmat: /* Dry Etch Tool Package Training */

2025-02-12T11:41:35Z

Dry Etch Tool Package Training

← Older revision		Revision as of 13:41, 12 February 2025
Line 9:		Line 9:
	'''Course Description'''		'''Course Description'''

	# Online lecture videos (theory~~, ~3h~~)		# Online lecture videos (theory)
	# Quizzes for each section		# Quizzes for each section
	# Online training videos (equipment operation~~, ~1/2h~~)		# Online training videos (equipment operation)
	# Group hands-on training ~~(~2h)~~		# Group hands-on training
	# Individual hands-on training (specific equipment)		# Individual hands-on training (specific equipment)

Mmat: /* Dry Etch Tool Package Trainnig */

2025-02-12T11:37:31Z

Dry Etch Tool Package Trainnig

← Older revision		Revision as of 13:37, 12 February 2025
Line 1:		Line 1:
	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]'''

	==Dry Etch Tool Package ~~Trainnig~~==		==Dry Etch Tool Package Training==

	DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].		DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].

Mmat: /* Dry Etch Tool Package Trainnig */

2025-02-12T11:27:51Z

Dry Etch Tool Package Trainnig

← Older revision		Revision as of 13:27, 12 February 2025
Line 45:		Line 45:
	*Jonas Michael-Lindhard		*Jonas Michael-Lindhard
	*Berit Herstrøm		*Berit Herstrøm


	If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].		If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].

Mmat: /* Dry Etch Tool Package Trainnig */

2025-02-12T11:27:07Z

Dry Etch Tool Package Trainnig

← Older revision		Revision as of 13:27, 12 February 2025
Line 20:		Line 20:
	'''Learning objectives'''		'''Learning objectives'''

	Learn about the fundamentals of plasma dry etch processing in a cleanroom:		''Learn about the fundamentals of plasma dry etch processing in a cleanroom:''
	* Generation and Characteristics of the Etch Plasma		* Generation and Characteristics of the Etch Plasma
	* Introduction to dry etch process		* Introduction to dry etch process

Mmat: /* Dry Etch Tool Package Trainnig */

2025-02-12T11:26:12Z

Dry Etch Tool Package Trainnig

← Older revision		Revision as of 13:26, 12 February 2025
Line 25:		Line 25:
	* Tuning of the dry etch process		* Tuning of the dry etch process
	* Overview of the dry etch equipment at Nanolab		* Overview of the dry etch equipment at Nanolab


	After the course you will be able to		After the course you will be able to

← Older revision		Revision as of 14:54, 12 February 2025
Line 2:		Line 2:

	==Dry Etch Tool Package Training==		==Dry Etch Tool Package Training==

	DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].		DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].
			<BR>
	The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here].		The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here].
			<BR>
			<BR>
	'''Course Layout'''		'''Course Layout'''
			<BR>
	# Online lecture videos (theory)		# Online lecture videos (theory)
	# Quizzes for each section		# Quizzes for each section
Line 14:		Line 14:
	# Group hands-on training		# Group hands-on training
	# Individual hands-on training (specific equipment)		# Individual hands-on training (specific equipment)
			<BR>
	''The individual hands-on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''		''The individual hands-on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
			<BR>
			<BR>

	'''Learning objectives'''		'''Learning objectives'''
			<BR>
	~~''Learn about the fundamentals of plasma dry etch processing in a cleanroom:''~~
	* Generation and Characteristics of the Etch Plasma		* Generation and Characteristics of the Etch Plasma
	* Introduction to dry etch process		* Introduction to dry etch process
	* Tuning of the dry etch process		* Tuning of the dry etch process
	* Overview of the dry etch equipment at Nanolab		* Overview of the dry etch equipment at Nanolab
			<BR>
	After the course you will be able to		''After the course you will be able to''
	* Know why and when to use dry etching		* Know why and when to use dry etching
	* Use the dry etchers without harming the machines		* Use the dry etchers without harming the machines
Line 34:		Line 32:
	* Spot when the recipe needs to be tuned for his/her needs and		* Spot when the recipe needs to be tuned for his/her needs and
	* Suggest relevant tuning parameters		* Suggest relevant tuning parameters
			<BR>
	'''Qualifying Prerequisites'''		'''Qualifying Prerequisites'''
			<BR>
	* Cleanroom safety course at DTU Nanolab		* Cleanroom safety course at DTU Nanolab
	* Admission to the cleanroom must be obtained before the group training session		* Admission to the cleanroom must be obtained before the group training session
			<BR>
	'''Course Responsible'''		'''Course Responsible'''
	*Jonas Michael-Lindhard		*Jonas Michael-Lindhard
	*Berit Herstrøm		*Berit Herstrøm
			<BR>


	If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].		If you have questions you can contact us via [mailto:dryetch@nanolab.dtu.dk dryetch@nanolab.dtu.dk].

	<br clear="all" />		<br clear="all" />
			<BR>
	===Material for preparations and further information ''(see also DTU Learn)''===		===Material for preparations and further information ''(see also DTU Learn)''===
	{\| style="color: black;" width="90%"		{\| style="color: black;" width="90%"