LabAdviser/314/Preparation 314-307/Solid-matter/FIB-lamella - Revision history

Jenk at 09:18, 9 September 2025

2025-09-09T09:18:15Z

← Older revision		Revision as of 11:18, 9 September 2025
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	(''content by Anton Bay Andersen @DTU Nanolab, March 2020'')		(''content by Anton Bay Andersen @DTU Nanolab, March 2020'')

	[[~~index.php?title=~~Category:314]]		[[Category:314]]
	[[~~index.php?title=~~Category:314-Preparation]]		[[Category:314-Preparation]]
	<!-- '''FIB lamella preparation''' -->		<!-- '''FIB lamella preparation''' -->

Jenk at 09:17, 9 September 2025

2025-09-09T09:17:51Z

← Older revision		Revision as of 11:17, 9 September 2025
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Preparation_314-307/Solid-matter/FIB-lamella click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Preparation_314-307/Solid-matter/FIB-lamella click here]'''

	(''content by Anton Bay Andersen @DTU Nanolab, March 2020'')		(''content by Anton Bay Andersen @DTU Nanolab, March 2020'')

	[[Category:314]]		[[index.php?title=Category:314]]
	[[Category:314-Preparation]]		[[index.php?title=Category:314-Preparation]]
	<!-- '''FIB lamella preparation''' -->		<!-- '''FIB lamella preparation''' -->

Jenk at 08:23, 27 June 2023

2023-06-27T08:23:09Z

← Older revision		Revision as of 10:23, 27 June 2023
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Preparation_314-307/Solid-matter/FIB-lamella click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Preparation_314-307/Solid-matter/FIB-lamella click here]'''

	(''content by Anton Bay Andersen, March 2020'')		(''content by Anton Bay Andersen @DTU Nanolab, March 2020'')

	[[Category:314]]		[[Category:314]]

Jenk at 14:44, 1 April 2020

2020-04-01T14:44:32Z

← Older revision		Revision as of 16:44, 1 April 2020
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			'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Preparation_314-307/Solid-matter/FIB-lamella click here]'''

			(''content by Anton Bay Andersen, March 2020'')

	[[Category:314]]		[[Category:314]]
	[[Category:314-Preparation]]		[[Category:314-Preparation]]
	'''FIB lamella preparation'''		<!-- '''FIB lamella preparation''' -->

	=FIB lamella preparation=		=FIB lamella preparation=
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	Note: Milling like described above makes a wedge shaped sample. This increases mechanical stability while still making an extremely thin sample at the surface. If a flat sample is desired you can compensate by tilting the sample. The amount of tilt depends on material, acceleration voltage and current, so a bit of experimenting is required.		Note: Milling like described above makes a wedge shaped sample. This increases mechanical stability while still making an extremely thin sample at the surface. If a flat sample is desired you can compensate by tilting the sample. The amount of tilt depends on material, acceleration voltage and current, so a bit of experimenting is required.



	~~(Anton Bay Andersen, March 2020)~~

	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Preparation_314-307/Solid-matter/FIB-lamella click here]'''

Jenk at 09:11, 27 March 2020

2020-03-27T09:11:46Z

← Older revision		Revision as of 11:11, 27 March 2020
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	[[Category:314]]		[[Category:314]]
	[[Category:314-~~Microscopy~~]]		[[Category:314-Preparation]]
	'''FIB lamella preparation'''		'''FIB lamella preparation'''

Jenk at 09:09, 27 March 2020

2020-03-27T09:09:16Z

← Older revision		Revision as of 11:09, 27 March 2020
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			[[Category:314]]
			[[Category:314-Microscopy]]
	'''FIB lamella preparation'''		'''FIB lamella preparation'''

Abaand: /* FIB lamella preparation */

2020-03-25T13:26:45Z

FIB lamella preparation

← Older revision		Revision as of 15:26, 25 March 2020
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	SEM sample) and attach it to a grid suitable for TEM imaging. The desired sample outcome is a lamella thin enough to be suited for TEM/STEM/EELS/EDX measurements (<100nm is desirable). Throughout this document it is assumed that the operator is an experienced SEM user, always works at eucentric height (the crossover of the ion and electron beam) and has an understanding of the chamber geometry. Furthermore, all settings are material and sample dependent. As a rule of thumb, the harder a material is the more difficult it is to mill with the ion beam. As an example, 20nA is on the low end for milling larger sections of corundum efficiently but 2.8nA is almost too aggressive for gold.		SEM sample) and attach it to a grid suitable for TEM imaging. The desired sample outcome is a lamella thin enough to be suited for TEM/STEM/EELS/EDX measurements (<100nm is desirable). Throughout this document it is assumed that the operator is an experienced SEM user, always works at eucentric height (the crossover of the ion and electron beam) and has an understanding of the chamber geometry. Furthermore, all settings are material and sample dependent. As a rule of thumb, the harder a material is the more difficult it is to mill with the ion beam. As an example, 20nA is on the low end for milling larger sections of corundum efficiently but 2.8nA is almost too aggressive for gold.

	== 1,2: Protective Pt deposition ==		== Step: 1,2: Protective Pt deposition ==
	[[File:fig1.PNG\|600px]]		[[File:fig1.PNG\|600px]]

Abaand: /* 1,2: Protective Pt deposition */

2020-03-25T13:26:25Z

1,2: Protective Pt deposition

← Older revision		Revision as of 15:26, 25 March 2020
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	== 1,2: ~~Protective Pt deposition~~ ==		== Step 3,4: Initial rough cut and rough cleaning ==

Abaand: /* FIB lamella preparation */

2020-03-25T13:25:22Z

FIB lamella preparation

← Older revision		Revision as of 15:25, 25 March 2020
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	[[File:~~fig6~~.png\|400px]]		[[File:fig9.png\|400px]]

	Fig 9: Attachment of the omni probe to a lamellae prior to cutting the lamellae free.		Fig 9: Attachment of the omni probe to a lamellae prior to cutting the lamellae free.

Abaand: /* FIB lamella preparation */

2020-03-25T13:24:22Z

FIB lamella preparation

← Older revision		Revision as of 15:24, 25 March 2020
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	Fig 2: Sketch of subsequent platinum deposition.		Fig 2: Sketch of subsequent platinum deposition.

	[[File:fig31.png\|~~600px~~]]		[[File:fig31.png\|400px]]

	[[File:fig32.png\|~~600px~~]]		[[File:fig32.png\|400px]]

	Fig 3: SE images acquired before and after electron beam deposited platinum.		Fig 3: SE images acquired before and after electron beam deposited platinum.
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	[[File:fig4.PNG\|~~600px~~]]		[[File:fig4.PNG\|500px]]

	Fig 4: Sketch of the desired rough cut and rough cleaning.		Fig 4: Sketch of the desired rough cut and rough cleaning.

	[[File:fig5_1.png\|~~600px~~]][[File:fig5_2.png\|~~600px~~]]		[[File:fig5_1.png\|400px]][[File:fig5_2.png\|400px]]

	Fig 5: SE images acquired with the ion beam before and after the rough cut.		Fig 5: SE images acquired with the ion beam before and after the rough cut.

	[[File:fig6.png\|~~600px~~]]		[[File:fig6.png\|400px]]

	Fig 6: SE images acquired with the ion beam after the rough cleaning.		Fig 6: SE images acquired with the ion beam after the rough cleaning.
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	==Step 5: Undercut ==		==Step 5: Undercut ==

	[[File:fig7.PNG\|~~600px~~]]		[[File:fig7.PNG\|500px]]

	Fig 7: Illustration of step 5-7.		Fig 7: Illustration of step 5-7.
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	[[File:~~fig9~~.~~PNG~~\|400px]]		[[File:fig6.png\|400px]]

	Fig 9: Attachment of the omni probe to a lamellae prior to cutting the lamellae free.		Fig 9: Attachment of the omni probe to a lamellae prior to cutting the lamellae free.
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	==Step 7: Attachment TEM grid==		==Step 7: Attachment TEM grid==

	[[File:fig10.PNG\|~~600px~~]]		[[File:fig10.PNG\|400px]]

	Fig 10: Attachment of the omniprobe to the omniprobe grid.		Fig 10: Attachment of the omniprobe to the omniprobe grid.
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	==Step 8: Final thinning with Ga beam==		==Step 8: Final thinning with Ga beam==

	[[File:fig11_1.png\|~~600px~~]][[File:fig11_2.png\|~~600px~~]]		[[File:fig11_1.png\|400px]][[File:fig11_2.png\|400px]]

	Fig 11: Viewing directions during thinning. Left ion beam, right electron beam.		Fig 11: Viewing directions during thinning. Left ion beam, right electron beam.