LabAdviser/314/Microscopy 314-307/SEM/AFEG - Revision history

Jenk at 09:15, 9 September 2025

2025-09-09T09:15:11Z

← Older revision		Revision as of 11:15, 9 September 2025
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	''This section is written by DTU Nanolab internal if nothing else is stated.''		''This section is written by DTU Nanolab internal if nothing else is stated.''
	[[Category:314]]		[[index.php?title=Category:314]]
	[[Category:314-Microscopy]]		[[index.php?title=Category:314-Microscopy]]
	__FORCETOC__		__FORCETOC__
	=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =		=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =

2023-06-27T08:11:10Z

← Older revision		Revision as of 10:11, 27 June 2023
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Microscopy_314-307/SEM/AFEG click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Microscopy_314-307/SEM/AFEG click here]'''

			''This section is written by DTU Nanolab internal if nothing else is stated.''
	[[Category:314]]		[[Category:314]]
	[[Category:314-Microscopy]]		[[Category:314-Microscopy]]

2020-05-28T07:24:18Z

← Older revision		Revision as of 09:24, 28 May 2020
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	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/SEM/AFEG click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/314/Microscopy_314-307/SEM/AFEG click here]'''

	[[Category:314]]		[[Category:314]]

2020-05-28T06:55:03Z

← Older revision	Revision as of 08:55, 28 May 2020
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2020-04-01T14:41:22Z

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 [[Category:314]]
 [[Category:314-Microscopy]]
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2020-03-27T09:08:29Z

← Older revision		Revision as of 11:08, 27 March 2020
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			[[Category:314]]
			[[Category:314-Microscopy]]
	__FORCETOC__		__FORCETOC__
	=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =		=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =

2020-03-26T13:04:26Z

← Older revision		Revision as of 15:04, 26 March 2020
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			__FORCETOC__
	=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =		=AFEG 250 Analytical ESEM (FEI Quanta FEG 250) =

2020-03-25T18:18:59Z

Equipment performance and process related parameters

← Older revision		Revision as of 20:18, 25 March 2020
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	* High vacuum (10<sup>-4</sup> Pa), Low vacuum (10 to 200Pa)		* High vacuum (10<sup>-4</sup> Pa), Low vacuum (10 to 200Pa)
	\|-		\|-
	!style="background:silver; color:black" align="center" valign="center" rowspan="3"\|~~Substrates~~		!style="background:silver; color:black" align="center" valign="center" rowspan="3"\|Samples
	\|style="background:LightGrey; color:black"\|Sample sizes		\|style="background:LightGrey; color:black"\|Sample sizes
	\|style="background:WhiteSmoke; color:black"\|		\|style="background:WhiteSmoke; color:black"\|

2020-03-25T12:56:55Z

AFEG 250 Analytical ESEM (FEI Quanta FEG 250)

← Older revision		Revision as of 14:56, 25 March 2020
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	*'''Electron source'''		*'''Electron source'''
	Field emission gun		**Field emission gun
	*'''Accelerating voltage'''		*'''Accelerating voltage'''
	500 V- 30 kV		**500 V- 30 kV
	*'''Resolution'''		*'''Resolution'''
	2 nm at 30 kV (SE)		**2 nm at 30 kV (SE)
	*'''Imaging detectors'''		*'''Imaging detectors'''
	Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD ~~and CCD Camera~~		**Everhart-Thornley (SE/BSE)
			**Solid State BSE
			**Large Field (LVD)
			**Gaseous SE (GSED)
			**Gaseous BSE
			**Gaseous Analytical (GAD)
			**STEM
			**vCD
	*'''Imaging modes'''		*'''Imaging modes'''
	High and low vacuum		High and low vacuum
	*'''Analytical capabilities'''		*'''Analytical capabilities'''
	Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)		**Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)
	Wavelength Dispersive Spectrosopy		**Wavelength Dispersive Spectrosopy

	==Equipment performance and process related parameters==		==Equipment performance and process related parameters==

2020-03-25T06:15:07Z

Equipment performance and process related parameters

← Older revision		Revision as of 08:15, 25 March 2020
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	{\| border="2" cellspacing="0" cellpadding="0"		{\| border="2" cellspacing="0" cellpadding="0"
	!colspan="2" border="none" style="background:silver; color:black;" align="center \|Equipment		!colspan="2" border="none" style="background:silver; color:black;" align="center \|Equipment
	\|style="background:WhiteSmoke; color:black" align="center"\|FEI Quanta FEG 250 ~~AFEG~~		\|style="background:WhiteSmoke; color:black" align="center"\|AFEG FEI Quanta FEG 250
	\|-		\|-
	!style="background:silver; color:black;" align="center" width="60"\| Purpose		!style="background:silver; color:black;" align="center" width="60"\| Purpose

← Older revision		Revision as of 08:15, 25 March 2020
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	{\| border="2" cellspacing="0" cellpadding="0"		{\| border="2" cellspacing="0" cellpadding="0"
	!colspan="2" border="none" style="background:silver; color:black;" align="center \|Equipment		!colspan="2" border="none" style="background:silver; color:black;" align="center \|Equipment
	\|style="background:WhiteSmoke; color:black" align="center"\|FEI Quanta FEG 250 ~~AFEG~~		\|style="background:WhiteSmoke; color:black" align="center"\|AFEG FEI Quanta FEG 250
	\|-		\|-
	!style="background:silver; color:black;" align="center" width="60"\| Purpose		!style="background:silver; color:black;" align="center" width="60"\| Purpose