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	<title>File:WF 2C1 feb2011profile 060.jpg - Revision history</title>
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	<updated>2026-05-09T02:51:22Z</updated>
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		<title>Jml: The profiles of the 180 nm thick zep resist wafers. The wafers have been over-exposed in the E-beam to make sure that all structures are opened - therefore the 30, 60, 90, 120 and 150 nm lines are somewhat wider.</title>
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		<updated>2011-03-18T10:29:33Z</updated>

		<summary type="html">&lt;p&gt;The profiles of the 180 nm thick zep resist wafers. The wafers have been over-exposed in the E-beam to make sure that all structures are opened - therefore the 30, 60, 90, 120 and 150 nm lines are somewhat wider.&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;The profiles of the 180 nm thick zep resist wafers. The wafers have been over-exposed in the E-beam to make sure that all structures are opened - therefore the 30, 60, 90, 120 and 150 nm lines are somewhat wider.&lt;/div&gt;</summary>
		<author><name>Jml</name></author>
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