https://labadviser.nanolab.dtu.dk//index.php?action=history&feed=atom&title=File%3ARs_AmorBor_vs_PolyBor_.pngFile:Rs AmorBor vs PolyBor .png - Revision history2026-05-14T12:12:04ZRevision history for this page on the wikiMediaWiki 1.43.3https://labadviser.nanolab.dtu.dk//index.php?title=File:Rs_AmorBor_vs_PolyBor_.png&diff=18026&oldid=prevPaphol: Sheet resistance on Boron doped poly-si using "POLYBOR" recipe, deposition time : 30 minutes, B2H6 flow at 7 sccm and 30 sccm, anneal : 950C 1 hour and Boron doped a-Si using "AMORBOR" recipe, Deposition time : 75 minutes, B2H6 flow at 7sccm, anneal: 9...2015-02-19T08:30:18Z<p>Sheet resistance on Boron doped poly-si using "POLYBOR" recipe, deposition time : 30 minutes, B2H6 flow at 7 sccm and 30 sccm, anneal : 950C 1 hour and Boron doped a-Si using "AMORBOR" recipe, Deposition time : 75 minutes, B2H6 flow at 7sccm, anneal: 9...</p>
<p><b>New page</b></p><div>Sheet resistance on Boron doped poly-si using "POLYBOR" recipe, deposition time : 30 minutes, B2H6 flow at 7 sccm and 30 sccm, anneal : 950C 1 hour and Boron doped a-Si using "AMORBOR" recipe, Deposition time : 75 minutes, B2H6 flow at 7sccm, anneal: 950C 1hour. (Result from Trine H. Christensen DTU Space)</div>Paphol