View source for LabAdviser/Courses/TPT Lithography

'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Lithography click here]''' 

DTU Nanolab offers a Tool Package Training in Lithography; the course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. 

The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.



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!colspan="2"|Lithography Tool Package Training
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!Schedule
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<!--'''<span style="color: red;">OBS: The December Litho TPT has been cancelled due to sickness. Contact the Lithography Group for rescheduling if this poses a problem.</span>''' <span style="text-decoration: line-through;">'''NEXT LECTURE: Tuesday 29th of November 9:15 - 13:00 (B347, Seminar room)'''</span>-->
'''Theoretical part'''
* Lecture videos that can be viewed at one's leisure. 
* A 1 hour "questions and exercises" session 2 times a month (typically Fridays 09:30-10:30). 
* '''Sign up via [https://doodle.com/poll/metywuzqziwps6w3 Q&E session Doodle]'''
'''Practical part'''
* <span style="color: red;">OBS: Due to a major maintenance project inside the cleanroom (replacing the fan filter units, cf. https://sites.dtu.dk/ffunanolab#2), these training sessions have been suspended, at least until the end of October 2021. Please, request individual trainings using training@nanolab.dtu.dk</span>
* A 3-4 hour training session 2 times a month, max. 4 persons per session (typically Wednesdays 09:00 - 12:30 or 10:00 - 13:30). 
* '''Sign up via [https://doodle.com/poll/yd2q9tbzm86by2ct Training session Doodle]'''
* This part is not mandatory, and may be replaced by individual trainings if relevant.
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!Location
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'''Theoretical part'''
* The location of the "questions and exercises" session is room 121A in building 345C.
'''Practical part'''
* The training session takes place inside the cleanroom. The meeting point will be in front of the first equipment.
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!Qualified Prerequisites
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* Cleanroom [http://www.nanolab.dtu.dk/english/education/courses/introduction-course Introduction course] at DTU Nanolab 
* Admission to the cleanroom must be obtained before the training session
* Theoretical part must be completed before the training session.
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!Preparations
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'''Before the "questions and exercises" session'''
* Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography] (Available online from DTU campus).
* Watch the [https://www.youtube.com/watch?v=hMgpRSOokxE&list=PLjWVU97LayHCHDueZ8qdT1LXJLGr4wLOa lecture videos] (7 videos, 2:41 hours in total). Write down any questions that may arise during the videos.
'''Before training session'''
* Complete the theoretical part (Q&E)
* Watch the [https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5 training videos] of spin coating (automatic), exposure (operation + alignment), and development (automatic).
* Study the equipment manuals. The manuals are available in [http://labmanager.danchip.dtu.dk LabManager].
* Study the [[LabAdviser/Courses/TPT_Lithography#Material_for_preparations_and_further_information|TPT process flows]] (first print + alignment).
'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the section below.'''
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!Course Responsible
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The Lithography Group at DTU Nanolab [mailto:lithography@nanolab.dtu.dk lithography@nanolab.dtu.dk].

Sign up for the course using Doodle (links under schedule). 
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!Learning Objectives
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* Describe fundamental parts of lithographic processing in a cleanroom, design of process flows
* Authorization to use spin coater, mask aligner, and developer at DTU Nanolab
* Calculate relevant process parameters
* Analyze and apply your results of lithographic processing 
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===Material for preparations and further information===
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'''<big>Literature</big>'''
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch9/pdf  Franssila, 2010, Chapter 9: Optical Lithography]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch10/pdf Franssila, 2010, Chapter 10: Advanced Lithography]
*[http://www.microchemicals.com/support/troubleshooter.html Lithography Troubleshooter from MicroChemicals]
*[http://www.microchemicals.com/downloads/application_notes.html Application Notes from MicroChemicals]


'''<big>Lecture videos</big>'''
<br/>7 videos, 2:41 hours in total
*[https://www.youtube.com/watch?v=hMgpRSOokxE&list=PLjWVU97LayHCHDueZ8qdT1LXJLGr4wLOa Playlist On YouTube] 
<!--*[http://podcast.llab.dtu.dk/index.php?id=302 On DTU Podcasts]-->
 

'''<big>Lecture slides</big>'''
*[[:Media:Litho_Tool_Package_-_Introduction.pdf|TPT slides: Introduction]]
*[[:Media:Litho_Tool_Package_-_Spin_coating.pdf‎|TPT slides: Spin Coating]]
*[[:Media:Litho_Tool_Package_-_Exposure.pdf|TPT slides: UV Exposure]]
*[[:Media:Litho_Tool_Package_-_Development.pdf‎|TPT slides: Development]]
*[[:Media:Litho_Tool_Package_-_Post_processing.pdf‎|TPT slides: Post-processing]]
*[[:Media:Litho_Tool_Package_-_Process_effects_and_examples.pdf|TPT slides: Process Effects and Examples]]


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'''<big>Training videos</big>'''

*[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5 Lithography TPT training videos (Playlist)]
<br/>
*[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Maskless aligner training videos (Playlist)]
*[https://www.youtube.com/watch?v=_neUkDsQhsM Spin Coater: Labspin (manual spin coater)]
*[https://www.youtube.com/watch?v=btinNzYnLnY Developer: TMAH Manual]
<!-- 
On DTU Podcasts:
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.055_Spin_Coater_GAMMA_UV-720p.mp4 Training Video: Automatic Spin Coater]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Training Video: UV Mask Aligner Part I (Operation)]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Training Video: UV Mask Aligner Part II (Alignment)]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.050_Developer_TMAH_UV-Lithography-720p.mp4 Training Video: Automatic Puddle Developer]
*[http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.049_Developer_Manual-720p.mp4 Training Video: Manual Puddle Developer]
-->


'''<big>Manuals</big>'''
*Automatic Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=359 Spin Coater: Gamma UV]
<!--*Manual Spin Coater: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 Spin Coater: Manual Standard Resists] -->
*UV Mask Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=339 Aligner: MA6 - 2] 
*Maskless Aligner: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=440 Aligner: Maskless 02] or [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=464 Aligner: Maskless 03]
*Automatic Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 Developer: TMAH UV-lithography]
<!--*Manual Puddle Developer: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 Developer: TMAH Manual] -->


'''<big>Process Flows</big>'''
*[[:Media:Process_Flow_TPT_first_print_v2.pdf|TPT first print process flow]]
*[[:Media:Process_Flow_TPT_alignment_v2.pdf|TPT alignment process flow]]

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