LabAdviser - Recent changes [en]

Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma E-beam and UV processing

Thes — Thu, 30 Jul 2026 14:01:28 GMT

Quality Control (QC)

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	*[~~http~~://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma e-beam & UV] - '''requires login'''<br>		*[https://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma e-beam & UV] - '''requires login'''<br>
	*[~~http~~://labmanager.dtu.dk/view_binary.php?fileId=4210 The newest QC data for Spin Coater: Gamma e-beam & UV] - '''requires login'''		*[https://labmanager.dtu.dk/view_binary.php?fileId=4210 The newest QC data for Spin Coater: Gamma e-beam & UV] - '''requires login'''
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	*[~~http~~://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma e-beam & UV] - '''requires login'''<br>		*[https://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin Coater: Gamma e-beam & UV] - '''requires login'''<br>
	*[~~https~~://labmanager.dtu.dk/view_binary.php?type=data&mach=417 The newest QC data for Spin Coater: Gamma e-beam & UV] - '''requires login'''		*[http://labmanager.dtu.dk/view_binary.php?type=data&mach=417 The newest QC data for Spin Coater: Gamma e-beam & UV] - '''requires login'''
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Specific Process Knowledge/Back-end processing/PDMS Process Line and Microfluidics

Meenadh — Thu, 30 Jul 2026 13:11:05 GMT

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	''Unless otherwise stated, all content on this page was created by PolyFabLab staff, DTU Nanolab. The document [https://www.epfl.ch/research/facilities/cmi/equipment/packaging-miscellaneous/pdms-line/ PDMS line] by EPFL was used as a reference for structure''		''Unless otherwise stated, all content on this page was created by PolyFabLab staff, DTU Nanolab. The document [https://www.epfl.ch/research/facilities/cmi/equipment/packaging-miscellaneous/pdms-line/ PDMS line] by EPFL was used as a reference for the structure''

	'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/XPS click here]'''		'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/XPS click here]'''
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	==PDMS Process line at DTU Nanolab==		==PDMS Process line at DTU Nanolab==

	Polydimethylsiloxane (PDMS), is a popular silicone elastomer for fabricating microfluidic devices and micro-total analytical systems (μTAS) with applications in life sciences, physics, chemistry, and more. The microfluidic devices integrate channels, chambers, porous membranes, valves and actuators, electrodes, optical paths, and more; and are often interfaced with living cells to biomimic organ and tissue functions. ~~The rapid-~~prototyping of PDMS enables fast ~~and~~ low cost iteration for development of microfluidic structures.		Polydimethylsiloxane (PDMS), is a popular silicone elastomer for fabricating microfluidic devices and micro-total analytical systems (μTAS) with applications in life sciences, physics, chemistry, and more. The microfluidic devices integrate channels, chambers, porous membranes, valves and actuators, electrodes, optical paths, and more; and are often interfaced with living cells to biomimic organ and tissue functions. Rapid prototyping of PDMS enables fast, low-cost iteration for the development of microfluidic structures.

	DTU Nanolab has a dedicated laboratory for ~~the~~ processing ~~of PDMS~~ and fabrication ~~of microfluidics~~ located in building 347. The PDMS Lab is part of the [https://www.nanolab.dtu.dk/polyfablab PolyFabLab], which opened its doors in 2026. PolyFabLab has been equipped with brand-new instruments funded by the [https://novonordiskfonden.dk/ Novo Nordisk Foundation], alongside selected equipment and processes from previous facilities.		DTU Nanolab has a dedicated laboratory for PDMS processing and microfluidics fabrication located in building 347. The PDMS Lab is part of the [https://www.nanolab.dtu.dk/polyfablab PolyFabLab], which opened its doors in 2026. PolyFabLab has been equipped with brand-new instruments funded by the [https://novonordiskfonden.dk/ Novo Nordisk Foundation], alongside selected equipment and processes from previous facilities.

	The process line for PDMS at DTU Nanolab is described in this website. The reader is referred to literature reviews for a deeper description of PDMS processing and applications. ([https://doi.org/10.3390/MI12111350 Lin & Chung, 2021]; [https://doi.org/10.1016/J.ACA.2020.09.013 Morbioli et al., 2020])		The process line for PDMS at DTU Nanolab is described on this website. The reader is referred to literature reviews for a deeper description of PDMS processing and applications. ([https://doi.org/10.3390/MI12111350 Lin & Chung, 2021]; [https://doi.org/10.1016/J.ACA.2020.09.013 Morbioli et al., 2020])

	== Working areas in the PDMS lab ==		== Working areas in the PDMS lab ==

Specific Process Knowledge/Polymer Processing/Polymer Processing/Additive methods/Quantum X 2PP

Danmah — Wed, 29 Jul 2026 15:25:24 GMT

Initial edit

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	~~This page~~ is for Quantum X align		[[File:Quantum X align.png\|thumb\|470x470px\|The Nanoscribe Quantum X align in PolyFabLab.]]

			== Introduction ==
			The Nanoscribe Quantum X align is a 3D printer based on two-photon polymerization (2PP) and designed for rapid microfabrication of polymer structures. It features a femtosecond pulsed diode laser operating at 780 nm outputting a laser power of 250 mW. In addition, it is equipped with a sample stage with a 50 × 50 × 20 mm travel range that can fit up to an 8-inch wafer, a confocal module for aligning prints to features on a substrate, a photoresist dispenser, and fiber illumination ports to facilitate the alignment of prints onto optical fibers.

			Job files are prepared using either DeScribeX or NanoPrintX. DeScribeX is used for large prints that exceed the print field of the microscope objective, while NanoPrintX is used for prints that need to be aligned to features on a substrate.
			[[File:Print chamber.png\|center\|thumb\|421x421px\|Print chamber of the Quantum X align with a 25× microscope objective and sample holder mounted.]]

			== Microscope objectives ==
			[[File:Objectives.png\|center\|thumb\|629x629px\|Microscope objectives available for the Quantum X align along with select specifications.]]

			== Photoresists ==
			Photoresists available to use free of charge are IP-Dip2 (for the 63× objective), IP-S (for the 25× objective), and IPX-Q (for the 10× and 5× objectives).

			== Substrates ==
			Substrates available to use free of charge are microscope slides (76 × 26 × 1 mm, silanized or unsilanized) and silicon chips (25 × 25 × 0.725 mm). Silicon wafers (from 1-inch up to 8-inch) can be used. For printing on chips and other small substrates, they can be placed on an adhesive gel-pak. It is also possible to use optical fibers as substrates.

File:Print chamber.png

Danmah — Wed, 29 Jul 2026 15:12:37 GMT

Danmah uploaded File:Print chamber.png

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Print chamber of the Quantum X align.

File:Objectives.png

Danmah — Wed, 29 Jul 2026 14:43:27 GMT

Danmah uploaded File:Objectives.png

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Microscope objectives available for the Quantum X align

File:Quantum X align.png

Danmah — Wed, 29 Jul 2026 14:21:37 GMT

Danmah uploaded File:Quantum X align.png

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Image of the Quantum X align.

Specific Process Knowledge/Polymer Processing/Polymer Processing/Coating/Parylene Coater

Meenadh — Wed, 29 Jul 2026 08:12:13 GMT

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	A parylene coater is the integrated CVD system — vaporiser, pyrolysis furnace, deposition chamber, cold trap, and vacuum system — used to run this process.		A parylene coater is the integrated CVD system — vaporiser, pyrolysis furnace, deposition chamber, cold trap, and vacuum system — used to run this process.

	~~In PolyFabLab, we have the~~ Diener Parylene P6 system and ~~currently allowed~~ dimer is Parylene C.		The '''Diener Parylene P6''' system in PolyFabLab is configured to process multiple parylene types, including '''Parylene C, N, D, and F'''. However, '''Parylene C''' is the only dimer provided as a standard material by DTU Nanolab. The P6 system is compatible with Parylene N, C, D, and F-type dimers.

			Users wishing to deposit '''Parylene N, D, or F''' must first obtain '''chemistry/process approval''' from the '''Safety Coordinator (Majken Becker)'''. Following this approval, the proposed process must be discussed with the '''lab/equipment responsible person (Meena Dhankhar)''' before use.

			Please note that '''Parylene N, D, and F dimers are not stocked by DTU Nanolab'''. Users are responsible for purchasing and supplying these materials themselves.

	===Chemistry in Brief===		===Chemistry in Brief===

Specific Process Knowledge/Back-end processing/PDMS Process Line and Microfluidics

Cchvi — Fri, 24 Jul 2026 09:46:33 GMT

References

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