Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions

Syringes should be filled the day before spin coating, and should be stored vertical in order to allow bubbles to settle at the top. A syringe consists of an end cap, the syringe barrel itself (30 ml or 55 ml, can be red or transparent), and a piston that seals of the syringe after filling. To fill a syringe, bring all parts to a fume hood along with the resist bottle. It is recommended to clean all parts with the nitrogen gun (these parts are normal labware, and thus not delivered particle free). Put the end cap on the syringe barrel and open the resist bottle. Hold the syringe at a slight angle and start pouring the resist from the bottle. Start gently and be patient; the flow of resist can quickly become too fast and too wide for the syringe. Let the resist flow down the side of the syringe to minimize bubble formation, but avoid the top couple of cm of the syringe. Stop pouring before it's too late; the viscous resist will continue to flow after you have lowered the bottle. Leave a couple of cm at the top to make sure there is room for the piston. When you have put down the resist bottle, insert the piston and push it all the way down to the surface of the resist in the syringe. Wipe any resist from the end of the syringe. If resist dripped on the outside of the bottle, wipe it off but avoid wiping the opening of the bottle (due to risk of contaminating the remaining resist). Finally, label your syringe and store it in the chemical cabinet (in E-4).