Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
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*'''1 DCH Gyrset cleaning''' | *'''1 DCH Gyrset cleaning''' | ||
Gyrset down; 10s @ 100rpm; 1s @ 0rpm; 10s @ -30rpm; 20s @ 1500rpm; Gyrset up. | Gyrset down; 10s @ 100rpm; 1s @ 0rpm; 10s @ -30rpm; 20s @ 1500rpm; Gyrset up. | ||
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*'''1 DCH predispense''' | *'''1 DCH predispense''' | ||
0.2s dispense at cup (arm position 0mm). | 0.2s dispense at cup (arm position 0mm). | ||
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==Manual dispense templates== | ==Manual dispense templates== | ||