Specific Process Knowledge/Characterization/SEM Supra 3: Difference between revisions
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|style="background:LightGrey; color:black"|Detectors | |style="background:LightGrey; color:black"|Detectors | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Secondary electron ( | *Secondary electron (SE2) | ||
*Inlens secondary electron (Inlens) | *Inlens secondary electron (Inlens) | ||
*High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB) | *High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB) | ||