Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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=Spin coaters at DTU Nanolab= | =Spin coaters at DTU Nanolab= | ||
==Spin track== | ==Spin track== | ||
<span style="color:red">The spin track was decommissioned | <span style="color:red">The spin track was decommissioned 2018-02-01.</span> | ||
[[Specific Process Knowledge/Lithography/Coaters/Spin_Track_1_%2B_2_processing|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Coaters/Spin_Track_1_%2B_2_processing|Information about decommissioned tool can be found here.]] | ||