Template:DanchipInfo: Difference between revisions

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| style="background:silver; color:black" align="left"| '''Process flow review'''
| style="background:silver; color:black" align="left"| '''Process flow review'''
|| [mailto:process_flow@nanolab.dtu.dk process_flow@nanolab.dtu.dk] (should work again)  
|| [mailto:process-flow@nanolab.dtu.dk process-flow@nanolab.dtu.dk] (should work again)  
|| More about process flow review [[Process_flow_approval|here]]
|| More about process flow review [[Process_flow_approval|here]]
|-
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| style="background:silver; color:black" align="left"| '''E-beam training'''
| style="background:silver; color:black" align="left"| '''E-beam training'''
|| [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk]<br> [mailto:e-beamload@nanolab.dtu.dk e-beamload@nanolab.dtu.dk]
|| [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk]
|| To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. <br> '''Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready:''' [[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Getting started]].
|| To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. <br> Please study the material on [[Specific Process Knowledge/Lithography/EBeamLithography|the EBL Labadviser pages.]]
|-
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| style="background:LightGrey; color:black" align="left"|'''Mask order/review:'''
| style="background:LightGrey; color:black" align="left"| '''E-beam load'''
|| [mailto:e-beamload@nanolab.dtu.dk e-beamload@nanolab.dtu.dk]
|| To request cassette loading on JEOL JBX-9500FSZ.
|-
| style="background:silver; color:black" align="left"|'''Mask order:'''
||  
||  
|| Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering [[Specific_Process_Knowledge/Lithography/Pattern_Design_and_Mask_Fabrication|here]]. It requires a specification file like this:  ([[mask_spec|example spec file]]) and a design file (gds or cif format).
|| Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering [[Specific_Process_Knowledge/Pattern_Design#Mask Ordering and Fabrication|here]]. It requires a specification file like this:  ([[mask_spec|example spec file]]) and a design file (gds or cif format).
|-
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| style="background:silver; color:black" align="left"|  
| style="background:LightGrey; color:black" align="left"|  
'''Mask Review'''  
'''Mask Review'''  
|| [mailto:mask@nanolab.dtu.dk?Subject=Mask%20Review&body=Please%20review%20the%20attached%20mask. mask@nanolab.dtu.dk (Subject: Mask Review)]
|| [mailto:mask@nanolab.dtu.dk?Subject=Mask%20Review&body=Please%20review%20the%20attached%20mask. mask@nanolab.dtu.dk (Subject: Mask Review)]
|| Note: You have to order masks at Compugraphics via Procure.  
|| Note: You have to order masks at Compugraphics via Procure.  
Nanolab can offer a check of the mask design and specifications. You can read more about mask design [[Specific_Process_Knowledge/Lithography/Pattern_Design_and_Mask_Fabrication|here]].
Nanolab can offer a check of the mask design and specifications. You can read more about mask design [[Specific_Process_Knowledge/Pattern_Design#Pattern Design and Mask Fabrication|here]].
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| style="background:LightGrey; color:black" align="left" | '''Metal wishes'''
| style="background:Silver; color:black" align="left" | '''Metal wishes'''
| style="background:WhiteSmoke; color:black" |  .  
| style="background:WhiteSmoke; color:black" |  .  
| style="background:WhiteSmoke; color:black" | .
| style="background:WhiteSmoke; color:black" | .
|-
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| style="background:silver; color:black" align="left"|  
| style="background:LightGrey; color:black" align="left"|  
'''Lesker:'''
'''Lesker:'''
| style="background:WhiteSmoke; color:black" |  [mailto:metal@nanolab.dtu.dk?Subject=Lesker%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20the%20Lesker%20from%20the%20period%20starting%20on%20Thursday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes)].
| style="background:WhiteSmoke; color:black" |  [mailto:metal@nanolab.dtu.dk?Subject=Lesker%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20the%20Lesker%20from%20the%20period%20starting%20on%20Thursday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes)].
| style="background:WhiteSmoke; color:black" |  - See current and future materials here: [http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=244&type=status Lesker status log]
| style="background:WhiteSmoke; color:black" |  - See current and future materials here: [http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=244&type=status Lesker status log]
|-
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| style="background:LightGrey; color:black" align="left"|  
| style="background:Silver; color:black" align="left"|  
'''Temescal/Wordentec/Physimeca:'''  
'''Temescal/Wordentec:'''  
| style="background:WhiteSmoke; color:black" | [mailto:pvd@nanolab.dtu.dk?Subject=Alcatel/Wordentec/Physimeca%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20%0A%0DThe%20Alcatel%20from%20the%20period%20starting%20on%20Tuesday%20DD%20MMM%20YYYY:%0A%0DThe%20Wordentec%20from%20the%20period%20starting%20on%20Tuesday/Friday%20DD%20MMM%20YYYY:%0A%0DThe%20Physimeca%20from%20the%20period%20starting%20on%20Wednessday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject:PVD Metal Wishes)]
| style="background:WhiteSmoke; color:black" | [mailto:metal@nanolab.dtu.dk?Subject=Temescal/Wordentec/Physimeca%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20%0A%0DThe%20Temescal%20from%20the%20period%20starting%20on%20Monday%20DD%20MMM%20YYYY:%0A%0DThe%20Wordentec%20from%20the%20period%20starting%20on%20Tuesday/Friday%20DD%20MMM%20YYYY:%0A%0DThe%20Physimeca%20from%20the%20period%20starting%20on%20Wednessday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject:PVD Metal Wishes)]
| style="background:WhiteSmoke; color:black" |  .
| style="background:WhiteSmoke; color:black" |  See current and future materials here:
* [http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=429&type=status Temescal]
* For Wordentec you need to contact the thin film group.
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| style="background:Silver; color:black" align="left"| '''Tool change'''  
| style="background:LightGrey; color:black" align="left"| '''Tool change'''  
| style="background:WhiteSmoke; color:black" | [mailto:toolchange@nanolab.dtu.dk toolchange@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | [mailto:toolchange@nanolab.dtu.dk toolchange@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" |  Laser: change of optics and <br /> Polymer Injection Molding machine: change mold-tool
| style="background:WhiteSmoke; color:black" |  Laser: change of optics and <br /> Polymer Injection Molding machine: change mold-tool
|-
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| style="background:LightGrey; color:black" align="left"| '''Commercial offers etc.'''
| style="background:SIlver; color:black" align="left"| '''Commercial offers etc.'''
||[mailto:sales@nanolab.dtu.dk sales@nanolab.dtu.dk]
||[mailto:sales@nanolab.dtu.dk sales@nanolab.dtu.dk]
||mostly companies nanolabexternal customers
||mostly companies nanolabexternal customers
|-
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| style="background:Silver; color:black" align="left"| '''Gas-related questions'''  
| style="background:LightGrey; color:black" align="left"| '''Gas-related questions'''  
| style="background:WhiteSmoke; color:black" |  [mailto:DCH-Gas@nanolab.dtu.dk DCH-Gas@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" |  [mailto:DCH-Gas@nanolab.dtu.dk DCH-Gas@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" |  issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use
| style="background:WhiteSmoke; color:black" |  issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use
|-
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| style="background:LightGrey; color:black" align="left"| '''All other inquiries'''
| style="background:Silver; color:black" align="left"| '''All other inquiries'''
|| [mailto:danchipsupport@nanolab.dtu.dk danchipsupport@nanolab.dtu.dk]
|| [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk]
|| ...  or if you are in doubt
|| ...  or if you are in doubt
|-  
|-  
|}
|}

Revision as of 14:58, 4 January 2024

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).

Mailbox link Concerning
LabAdviser Mailbox labadviser@nanolab.dtu.dk Any questions or feedback to LabAdviser.
Process flow review process-flow@nanolab.dtu.dk (should work again) More about process flow review here
Training on equipment training@nanolab.dtu.dk It is our goal to answer your request regarding process flow reviews and training within 2 workdays.
E-beam training e-beam@nanolab.dtu.dk To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems.
Please study the material on the EBL Labadviser pages.
E-beam load e-beamload@nanolab.dtu.dk To request cassette loading on JEOL JBX-9500FSZ.
Mask order: Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering here. It requires a specification file like this: (example spec file) and a design file (gds or cif format).

Mask Review

mask@nanolab.dtu.dk (Subject: Mask Review) Note: You have to order masks at Compugraphics via Procure.

Nanolab can offer a check of the mask design and specifications. You can read more about mask design here.

Metal wishes . .

Lesker:

metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes). - See current and future materials here: Lesker status log

Temescal/Wordentec:

metal@nanolab.dtu.dk (Subject:PVD Metal Wishes) See current and future materials here:
  • Temescal
  • For Wordentec you need to contact the thin film group.
Tool change toolchange@nanolab.dtu.dk Laser: change of optics and
Polymer Injection Molding machine: change mold-tool
Commercial offers etc. sales@nanolab.dtu.dk mostly companies nanolabexternal customers
Gas-related questions DCH-Gas@nanolab.dtu.dk issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use
All other inquiries nanolabsupport@nanolab.dtu.dk ... or if you are in doubt
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