Template:DanchipInfo: Difference between revisions

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In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to Danchip.<br />
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).<br />


{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  
|-
|-
| style="background:silver; color:black" align="left"|'''Mailbox'''
| style="background:silver; color:black" align="left"|'''Mailbox'''
| align="center" style="background:#f0f0f0;"|'''link'''
| align="center" style="background:LightGrey; color:black"| '''link'''
| align="center" style="background:#f0f0f0;"|'''Concerning'''
| align="center" style="background:LightGrey; color:black"| '''Concerning'''
|-
|-
| style="background:silver; color:black" align="left"| '''LabAdviser Mailbox'''
| style="background:LightGrey; color:black" align="left"| '''LabAdviser Mailbox'''
|| [mailto:labadviser@danchip.dtu.dk labadviser@danchip.dtu.dk]
| style="background:WhiteSmoke; color:black" | [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk]
|| Any questions or feedback to LabAdviser.  
| style="background:WhiteSmoke; color:black" | Any questions or feedback to LabAdviser.  
|-
|-
| style="background:silver; color:black" align="left"| '''Process flow review'''
| style="background:silver; color:black" align="left"| '''Process flow review'''
|| [mailto:process_flow@danchip.dtu.dk process_flow@danchip.dtu.dk]
|| [mailto:process-flow@nanolab.dtu.dk process-flow@nanolab.dtu.dk] (should work again)
|| More about process flow review [[Process_flow_approval|here]]
|| More about process flow review [[Process_flow_approval|here]]
|-
|-
| style="background:silver; color:black" align="left"|'''Training on equipment'''
| style="background:LightGrey; color:black" align="left"|'''Training on equipment'''
||[mailto:training@danchip.dtu.dk training@danchip.dtu.dk]
| style="background:WhiteSmoke; color:black" |[mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]
|| It is our goal to answer your request regarding process flow reviews and training within 2 workdays.
| style="background:WhiteSmoke; color:black" | It is our goal to answer your request regarding process flow reviews and training within 2 workdays.
|-
|-
| style="background:silver; color:black" align="left"| '''Mask order/review:'''
| style="background:silver; color:black" align="left"| '''E-beam training'''
||  
|| [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk]
|| More about mask design [[Photolithography/Making Mask design|here]]
|| To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. <br> Please study the material on [[Specific Process Knowledge/Lithography/EBeamLithography|the EBL Labadviser pages.]]
|-
|-
| style="background:silver; color:black" align="left"| '''Order only (DeltaMask)'''
| style="background:LightGrey; color:black" align="left"| '''E-beam load'''
||[mailto:mask@danchip.dtu.dk?Subject=Mask%20Order%20Only&body=Please%20order%20the%20attached%20mask mask@danchip.dtu.dk (Subject: Mask Order Only)]
|| [mailto:e-beamload@nanolab.dtu.dk e-beamload@nanolab.dtu.dk]
||Note Mask will be ordered from DeltaMask. Nothing will be checked in this case. Neither mask design nor specs file. Minimal feature 1.5µm.
|| To request cassette loading on JEOL JBX-9500FSZ.
Requires a specs file like this: ([[mask_spec|example spec file]]).  
|-
|-
| style="background:silver; color:black" align="left"| '''Review and Order'''  
| style="background:silver; color:black" align="left"|'''Mask order:'''
|| [mailto:mask@danchip.dtu.dk?Subject=Mask%20Review&body=Please%20review%20the%20attached%20mask. mask@danchip.dtu.dk (Subject: Mask Review)]
||  
||
|| Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering [[Specific_Process_Knowledge/Pattern_Design#Mask Ordering and Fabrication|here]]. It requires a specification file like this:  ([[mask_spec|example spec file]]) and a design file (gds or cif format).
|-
|-
| style="background:silver; color:black" align="left"| '''Metal wishes'''
| style="background:LightGrey; color:black" align="left"|  
||  
'''Mask Review'''  
||
|| [mailto:mask@nanolab.dtu.dk?Subject=Mask%20Review&body=Please%20review%20the%20attached%20mask. mask@nanolab.dtu.dk (Subject: Mask Review)]
|| Note: You have to order masks at Compugraphics via Procure.
Nanolab can offer a check of the mask design and specifications. You can read more about mask design [[Specific_Process_Knowledge/Pattern_Design#Pattern Design and Mask Fabrication|here]].
|-
|-
| style="background:silver; color:black" align="left"| '''Lesker:'''
| style="background:Silver; color:black" align="left" | '''Metal wishes'''
||[mailto:metal@danchip.dtu.dk?Subject=Lesker%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20the%20Lesker%20from%20the%20period%20starting%20on%20Thursday%20DD%20MMM%20YYYY: metal@danchip.dtu.dk (Subject: Lesker Metal Wishes)].
| style="background:WhiteSmoke; color:black" |  .  
|| - See current and future materials here: [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=log&id=244&type=status Lesker status log]
| style="background:WhiteSmoke; color:black" | .
|-
|-
| style="background:silver; color:black" align="left"| '''Alcatel/Wordentec/Physimeca:'''  
| style="background:LightGrey; color:black" align="left"|  
||[mailto:pvd@danchip.dtu.dk?Subject=Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20%0A%0DThe%20Alcatel%20from%20the%20period%20starting%20on%20Tuesday%20DD%20MMM%20YYYY:%0A%0DThe%20Wordentec%20from%20the%20period%20starting%20on%20Tuesday/Friday%20DD%20MMM%20YYYY:%0A%0DThe%20Physimeca%20from%20the%20period%20starting%20on%20Wednessday%20DD%20MMM%20YYYY: metal@danchip.dtu.dk (Subject: Alcatel/Wordentec/Physimeca Metal Wishes)].
'''Lesker:'''
||
| style="background:WhiteSmoke; color:black" | [mailto:metal@nanolab.dtu.dk?Subject=Lesker%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20the%20Lesker%20from%20the%20period%20starting%20on%20Thursday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes)].
| style="background:WhiteSmoke; color:black" | - See current and future materials here: [http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=244&type=status Lesker status log]
|-
|-
| style="background:silver; color:black" align="left"| '''e-beam request'''
| style="background:Silver; color:black" align="left"|  
|| [mailto:e-beam@danchip.dtu.dk?Subject=E-beam%20Request&body=Name:%20%0A%0DLabManager%20project%20name:%0A%0DNumber,%20size%20and%20type%20of%20samples:%0A%0DCondition%20file%20(eg%200.2nA_ap5):%0A%0DEstimated%20exposure%20time:%0A%0DOptical%20Alignment?%0A%0DPlease%20specify%20level%20of%20training%20required%20and%20whether%20jdf-%20,%20sdf%20and%20gds-files%20are%20ready%20to%20mgn-conversion: e-beam@danchip.dtu.dk]
'''Temescal/Wordentec:'''  
||
| style="background:WhiteSmoke; color:black" | [mailto:metal@nanolab.dtu.dk?Subject=Temescal/Wordentec/Physimeca%20Metal%20Wishes&body=I%20would%20like%20the%20following%20metals%20in%20%0A%0DThe%20Temescal%20from%20the%20period%20starting%20on%20Monday%20DD%20MMM%20YYYY:%0A%0DThe%20Wordentec%20from%20the%20period%20starting%20on%20Tuesday/Friday%20DD%20MMM%20YYYY:%0A%0DThe%20Physimeca%20from%20the%20period%20starting%20on%20Wednessday%20DD%20MMM%20YYYY: metal@nanolab.dtu.dk (Subject:PVD Metal Wishes)]
| style="background:WhiteSmoke; color:black" | See current and future materials here:
* [http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=429&type=status Temescal]
* For Wordentec you need to contact the thin film group.
|-
|-
| style="background:silver; color:black" align="left"| '''Tool change'''  
| style="background:LightGrey; color:black" align="left"| '''Tool change'''  
||[mailto:toolchange@danchip.dtu.dk toolchange@danchip.dtu.dk]
| style="background:WhiteSmoke; color:black" | [mailto:toolchange@nanolab.dtu.dk toolchange@nanolab.dtu.dk]
|| Currently only on Polymer Injection Molding machine
| style="background:WhiteSmoke; color:black" | Laser: change of optics and <br /> Polymer Injection Molding machine: change mold-tool
|-
|-
| style="background:silver; color:black" align="left"| '''Commercial offers etc.'''
| style="background:SIlver; color:black" align="left"| '''Commercial offers etc.'''
||[mailto:sales@danchip.dtu.dk sales@danchip.dtu.dk]
||[mailto:sales@nanolab.dtu.dk sales@nanolab.dtu.dk]
||mostly companies and external customers
||mostly companies nanolabexternal customers
|-
|-
| style="background:silver; color:black" align="left"| '''Gas-related questions'''  
| style="background:LightGrey; color:black" align="left"| '''Gas-related questions'''  
|| [mailto:DCH-Gas@danchip.dtu.dk DCH-Gas@danchip.dtu.dk]
| style="background:WhiteSmoke; color:black" | [mailto:DCH-Gas@nanolab.dtu.dk DCH-Gas@nanolab.dtu.dk]
|| issues (information regarding ordering, delivery, changing etc. Mostly for internal Danchip use
| style="background:WhiteSmoke; color:black" | issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use
|-
|-
| style="background:silver; color:black" align="left"| '''All other inquiries'''
| style="background:Silver; color:black" align="left"| '''All other inquiries'''
|| [mailto:danchipsupport@danchip.dtu.dk danchipsupport@danchip.dtu.dk]
|| [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk]
|| ...  or if you are in doubt
|| ...  or if you are in doubt
|-
|}

Revision as of 14:58, 4 January 2024

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).

Mailbox link Concerning
LabAdviser Mailbox labadviser@nanolab.dtu.dk Any questions or feedback to LabAdviser.
Process flow review process-flow@nanolab.dtu.dk (should work again) More about process flow review here
Training on equipment training@nanolab.dtu.dk It is our goal to answer your request regarding process flow reviews and training within 2 workdays.
E-beam training e-beam@nanolab.dtu.dk To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems.
Please study the material on the EBL Labadviser pages.
E-beam load e-beamload@nanolab.dtu.dk To request cassette loading on JEOL JBX-9500FSZ.
Mask order: Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering here. It requires a specification file like this: (example spec file) and a design file (gds or cif format).

Mask Review

mask@nanolab.dtu.dk (Subject: Mask Review) Note: You have to order masks at Compugraphics via Procure.

Nanolab can offer a check of the mask design and specifications. You can read more about mask design here.

Metal wishes . .

Lesker:

metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes). - See current and future materials here: Lesker status log

Temescal/Wordentec:

metal@nanolab.dtu.dk (Subject:PVD Metal Wishes) See current and future materials here:
  • Temescal
  • For Wordentec you need to contact the thin film group.
Tool change toolchange@nanolab.dtu.dk Laser: change of optics and
Polymer Injection Molding machine: change mold-tool
Commercial offers etc. sales@nanolab.dtu.dk mostly companies nanolabexternal customers
Gas-related questions DCH-Gas@nanolab.dtu.dk issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use
All other inquiries nanolabsupport@nanolab.dtu.dk ... or if you are in doubt
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