Specific Process Knowledge/Thin film deposition/Deposition of Scandium Nitride: Revision history

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9 November 2023

  • curprev 12:4412:44, 9 November 2023‎ Eves talk contribs‎ 1,060 bytes +1,060‎ Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Scandium_Nitride&action=submit click here]''' <i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> == Deposition of Niobium Titanium Nitride == Deposition of ScN can only be done by reactive sputtering using Sc target. The on..."
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