Specific Process Knowledge/Thermal Process/Furnace Noble: Revision history

2 February 2023

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21 February 2020

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10 July 2019

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13 March 2017

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25 August 2014

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28 February 2014

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16 January 2014

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14 January 2014

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11 October 2013

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14 February 2013

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3 December 2012

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26 November 2012

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29 November 2010

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• curprev 12:5712:57, 29 November 2010‎ Tg talk contribs‎ 1,550 bytes +1,550‎ New page: ==Noble Furnace== This furnace is used to grow oxide on metals or dirty wafers and to anneal wafers up to 1000 degree Celsius. The Noble Furnace is located in service room 3. ==Overview ...