Specific Process Knowledge/Lithography/LiftOff

From LabAdviser
< Specific Process Knowledge‎ | Lithography
Revision as of 13:37, 9 August 2013 by Tigre (talk | contribs) (Created page with "==Lift-off wet bench== 300x300px|thumb|Acetone lift-off: positioned in cleanroom 3 This bench is only for wafers with metal! Here are the main ...")
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search

Lift-off wet bench

Acetone lift-off: positioned in cleanroom 3

This bench is only for wafers with metal!

Here are the main rules for lift-off bench use:

  • Place the wafers in a dedicated wafer holder.
  • Put the holder in the acetone and start the ultrasound. The strip off time is depending of resist thickness.
  • Rinse your wafers for 4-5 min. in running water after stripping.

Find more info about the lift-off process here: Specific Process Knowledge/Photolithography/AZ5214E standard resist - reverse process