Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Revision history

14 November 2023

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13 November 2023

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6 November 2023

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31 October 2023

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• curprev 09:4109:41, 31 October 2023‎ Thope talk contribs‎ 683 bytes +683‎ Created page with "In E-beam lithography it is often necesarry to do a dose test in order to get the required result. In a dose test one will expose critical parts of a pattern with various doses and determine the best dose by SEM analysis of the final pattern. There are several ways to set up a dose test array on the JEOL system, in this section we will describe four different setups, each with their own benefits and drawbacks. =Simple SDF sequencing= The most straightforward method is t..."