Specific Process Knowledge/Direct Structure Definition

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Direct Structure Definiton

By direct structure definition we mean that you form the structures for you device directly in the material that the device consist of without any masking steps. Some of the techniques may require a master.

Choose method of structuring/equipment

• UV Lithography
• 2-Photon Polymerization Lithography
• Nano Imprint Lithography
• Polymer Injection Molder
• Laser Micromachining Tool/ablation
• Dicing saw

Materials for structuring

• Polymers
  • SU-8
    • 2-Photon Polymerization Lithography
  • Topas
    • Polymer Injection Molder
    • Nano Imprint Lithography
    • Laser ablation
  • PMMA
    • Nano Imprint Lithography
    • Laser ablation
  • AZ resists
    • 2-Photon Polymerization Lithography
  • ...
• Metals/Silicon/Graphene
  • Laser ablation
• Glass
  • Laser ablation
  • Dicing saw
  • Sandblasting (at DTU Nanotech).

Comparison of equipment/material

	Nano Imprint Lithography	UV Lithography	2-Photon Polymerization Lithography	Polymer Injection Molder	Laser Micromachining Tool	Dicing saw
General description
Allowed materials	1	2	3	4	5	6
Sample sizes	1	2	3	4	5	6
Prerequisites	1	2	3	4	5	6
Pattern generation	1	2	3	4	5	6
Throughput	1	2	3	4	5	6
Min/max featuresize	1	2	3	4	5	6
Min/max aspect-ratio	1	2	3	4	5	6
Post-treatment	1	2	3	4	5	6
Patterning degree of freedom	1	2	3	4	5	6