Specific Process Knowledge/Bonding/Fusion bonding: Revision history

6 February 2023

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25 November 2019

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18 May 2017

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8 April 2016

• curprev 10:5910:59, 8 April 2016‎ Taran talk contribs‎ 2,282 bytes −18‎ →‎Fusion Bonding

22 October 2013

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23 April 2008

• curprev 09:4809:48, 23 April 2008‎ BGE talk contribs‎ 2,090 bytes +26‎ →‎Fusion Bonding

14 March 2008

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13 March 2008

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• curprev 11:2811:28, 13 March 2008‎ Rkc talk contribs‎ 1,941 bytes +67‎ →‎Bonding procedure
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10 March 2008

• curprev 15:5815:58, 10 March 2008‎ Rkc talk contribs‎ 1,340 bytes +1,340‎ New page: ==Fusion Bonding== Fusion bonding is a weaker bond between e.g. two clean Si wafers. It is absolutely necessary for the wafers to be very clean and to be annealed at 1000<math>\rm{^o}</ma...