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Contents
1
This page gives an overview of the electron microscope equipment and other related resources connected to DTU Nanolab - building 307/314
1.1
SEM
1.2
Dual Beam
1.3
TEM
1.4
Ancillary Equipment
1.5
Post Processing
This page gives an overview of the electron microscope equipment and other related resources connected to DTU Nanolab - building 307/314
SEM
SEM Comparison page - all of DTU Nanolabs SEMs
Nova NanoSEM 600
Quanta FEG 200 ESEM
Dual Beam
Helios NanoLAB 600
TEM
Titan ATEM
Titan ETEM
Tecnai T20 TEM
Tecnai T12 Junior TEM
Ancillary Equipment
Optical microscopes
Ion milling
Pumping stations
Polishing
Saws
Plasma cleaner
Coaters
Sonicators
Hot plates
Plunger
Microtomes
Critical point dryer
Centrifuge
pH meter
Post Processing
Resources for Post Processing
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Navigation
Main Page
TPT/Intro Courses
Training Videos
DTU Nanolab Projects
Cleanroom Naming and phones (B346)
Characterization Layout and phones (B314)
Nano Characterization B314/307
Overview DTU Nanolab – building 314/307
Microscopy
Preparation
Safety
Micro/Nano Fabrication B346/347
Pattern Design and Mask Fabrication
Back-end processing
Bonding
Characterization
Direct Structure Definition
Doping
Etch
Imprinting
Lithography
Thermal process
Thin film deposition
Wafer and sample drying
Wafer cleaning
Wafer information
Overview of Fume Hoods
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Nanolab fabrication contact info
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