LabAdviser: Difference between revisions
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*'''[[/Process flow approval|Process flow approval]]''' | *'''[[/Process flow approval|Process flow approval]]''' | ||
*'''[[Specific Process Knowledge]]''' | *'''[[Specific Process Knowledge]]''' | ||
**[[Specific Process Knowledge/Back-end processing|Back-end processing]] | |||
**[[Specific Process Knowledge/Bonding|Bonding]] | |||
**[[Specific Process Knowledge/Characterization|Characterization]] | |||
**[[Specific Process Knowledge/E-beam lithography|E-beam lithography]] | |||
**[[Specific Process Knowledge/Etch|Etch]] | |||
**[[Specific Process Knowledge/Imprinting|Imprinting]] | |||
**[[Specific Process Knowledge/Photolithography|Photolithography]] | **[[Specific Process Knowledge/Photolithography|Photolithography]] | ||
**[[Specific Process Knowledge/Thermal Process|Thermal process]] | |||
**[[Specific Process Knowledge/Thin film deposition|Thin film deposition]] | **[[Specific Process Knowledge/Thin film deposition|Thin film deposition]] | ||
**[[Specific Process Knowledge/ | **[[Specific Process Knowledge/Wafer and sample drying|Wafer and sample drying]] | ||
**[[Specific Process Knowledge/Wafer cleaning|Wafer cleaning]] | **[[Specific Process Knowledge/Wafer cleaning|Wafer cleaning]] | ||
**[[Specific Process Knowledge/Wafer | **[[Specific Process Knowledge/Wafer Information|Wafer Information]] | ||
**[[Specific Process Knowledge/III-V Process|III-V Processes]] | **[[Specific Process Knowledge/III-V Process|III-V Processes]] | ||
*'''[[Substrates]]''' | *'''[[Substrates]]''' | ||
*'''[[New equipment in the pipeline]]''' | *'''[[New equipment in the pipeline]]''' |
Revision as of 08:20, 19 October 2012
LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities. The function and capacity of each piece of equipment is described in detail and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to log in. LabAdviser is only editable for Danchip employees. If you need further information about certain machinery or processes, please contact the Danchip personnel.
Contents
- Danchip contact information
- Process flow approval
- Specific Process Knowledge
- Substrates
- New equipment in the pipeline
- Old equipment for decommissioning
- Surveys and statistics
Danchip Contact Info
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab (formerly known as Danchip).
Subject | Description | |
Training and Process Flow | training@nanolab.dtu.dk | All requests regarding equipment training and process flows. Please add your Name to the subject line. Note: Requests are commonly answered within 2 workdays. |
E-beam training | e-beam@nanolab.dtu.dk | Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages beforehand. |
E-beam Cassette loading | e-beamload@nanolab.dtu.dk | Requests regarding cassette loading on JEOL JBX-9500FSZ. |
General inquiries | nanolabsupport@nanolab.dtu.dk | Inquiries related to machines, cleanroom access, Mask review, tool changes, and others. Please add your Name to the subject line. Note: Requests are commonly answered within 2 workdays. |
Metal Wishes | metal@nanolab.dtu.dk | Requests for change of metal in Thin Film Deposition equipment. See current and future materials in statuslog of the respective machines.
|
Gas-related Requests | DCH-Gas@nanolab.dtu.dk | All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use. |
LabAdviser Mailbox | labadviser@nanolab.dtu.dk | Any questions or feedback to LabAdviser. |
Commercial Inquiries | sales@nanolab.dtu.dk | For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc |