LabAdviser: Difference between revisions
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*'''[[New equipment in the pipeline]]''' | *'''[[New equipment in the pipeline]]''' | ||
*'''[[Old equipment for decommissioning]]''' | *'''[[Old equipment for decommissioning]]''' | ||
*'''[[/LabAdviser Updates| | *'''[[/LabAdviser Updates|Recent updates of LabAdviser]]''' | ||
*'''[[Surveys and statistics]]''' | *'''[[Surveys and statistics]]''' | ||
*'''[[How to add information to LabAdviser]]''' | *'''[[How to add information to LabAdviser]]''' | ||
Revision as of 14:18, 30 November 2012
LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities. The function and capacity of each piece of equipment is described in detail and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to log in. LabAdviser is only editable for Danchip employees. If you need further information about certain machinery or processes, please contact the Danchip personnel.
Contents
- Danchip contact information
- Process flow approval
- Specific Process Knowledge
- New equipment in the pipeline
- Old equipment for decommissioning
- Recent updates of LabAdviser
- Surveys and statistics
- How to add information to LabAdviser
Danchip Contact Info
In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).
| Mailbox | link | Concerning |
| LabAdviser Mailbox | labadviser@nanolab.dtu.dk | Any questions or feedback to LabAdviser. |
| Process flow review | process-flow@nanolab.dtu.dk (should work again) | More about process flow review here |
| Training on equipment | training@nanolab.dtu.dk | It is our goal to answer your request regarding process flow reviews and training within 2 workdays. |
| E-beam training | e-beam@nanolab.dtu.dk | To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages. |
| E-beam load | e-beamload@nanolab.dtu.dk | To request cassette loading on JEOL JBX-9500FSZ. |
| Mask order: | Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering here. It requires a specification file like this: (example spec file) and a design file (gds or cif format). | |
|
Mask Review |
mask@nanolab.dtu.dk (Subject: Mask Review) | Note: You have to order masks at Compugraphics via Procure.
Nanolab can offer a check of the mask design and specifications. You can read more about mask design here. |
| Metal wishes | . | . |
|
Lesker: |
metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes). | - See current and future materials here: Lesker status log |
|
Temescal/Wordentec: |
metal@nanolab.dtu.dk (Subject:PVD Metal Wishes) | See current and future materials here:
|
| Tool change | toolchange@nanolab.dtu.dk | Laser: change of optics and Polymer Injection Molding machine: change mold-tool |
| Commercial offers etc. | sales@nanolab.dtu.dk | mostly companies nanolabexternal customers |
| Gas-related questions | DCH-Gas@nanolab.dtu.dk | issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use |
| All other inquiries | nanolabsupport@nanolab.dtu.dk | ... or if you are in doubt |