LabAdviser

LabAdviser is the Danchip process handbook. It covers process knowledge to be used in the cleanroom facility of DTU Danchip. The aim of LabAdviser is to gather information on processing in the facility. To begin with we aim at entering all the basic processes that are run on the equipments. On a longer term we hope LabAdviser can be the natural place for Danchip staff and all our cleanroom users to share new process knowledge with each other. This is NOT a book on the theory behind the processes - for that you need to look else where. We should also emphasize that we do not guarantee that you can repeat the results found in this handbook. The information in the book is meant to Advise you to good starting points for YOU to further optimize to YOUR needs. To enter LabAdviser you need to log in.

Contents

• Specific Process Knowledge
  • Photolithography
  • Thin film deposition
  • Etch
  • Wafer cleaning
  • Wafer and sample drying
  • Thermal process
  • Imprinting
  • Bonding
  • Back-end processing
  • Characterization
  • E-beam lithography
  • III-V Process
• Substrates
  • Small substrates
  • 65 mm by 65 mm by 6.35 mm substrates
  • 150 mm by 150 mm by 6.35 mm substrates
  • 50 mm round, 2"
  • 100 mm round, 4"
  • 150 mm round, 6"
  • 200 mm round, 8"
  • 250 mm round, 10"
  • AlGaAs, InP, GaN
• New equipment in the pipeline
• Old equipment for decommissioning
• Surveys and statistics
• Projects, Thesis and Articles
• How to add information to LabAdviser