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<!--LabAdviser is a process handbook for equipment and processes at the cleanroom facilities and the characterisation facilities in building 314/307. The function and capacity of each piece of equipment is described and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to '''log in with your DTU login'''. LabAdviser is only editable for Danchip and CEN employees. If you need further information about certain machinery or processes, please contact the Danchip or CEN personnel. Any feedback you might have on LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: [mailto:labadviser@danchip.dtu.dk labadviser@danchip.dtu.dk]-->
<!--LabAdviser is a process handbook for equipment and processes at the cleanroom facilities and the characterisation facilities in building 314/307. The function and capacity of each piece of equipment is described and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to '''log in with your DTU login'''. LabAdviser is only editable for DTU Nanolab employees. If you need further information about certain machinery or processes, please contact Nanolab personnel. Any feedback you might have on LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk]-->
LabAdviser is a wiki that contains information about  
LabAdviser is a wiki that contains information about  
*equipment at DTU Nanolab that covers micro and nano fabrication in the cleanroom facility in building 346 and surroundings (in building 346 and 347) and characterization equipment, primarily electron microscopy, at building 314 and 307.   
*equipment at DTU Nanolab that covers micro and nano fabrication in the cleanroom facility in building 346 and surroundings (in building 346 and 347) and characterization equipment, primarily electron microscopy, at building 314 and 307.   
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'''News in LabAdviser:''' <br/>
'''News in LabAdviser:''' <br/>
*The latest monthly LabAdviser update: [[Media:Monthly_LabAdviser_update_20190311.docx|LabAdviser update send out 2019-03-13]] <br>
*The latest LabAdviser update: [[Media:Monthly_LabAdviser_update_20200117.docx|LabAdviser update send out 2020-01-17]] <br>
<!-- Slides from the customer meeting December 2016: [[media:Stormode 2016.pdf|2016 Customer meeting]] -->
<!-- Slides from the customer meeting December 2016: [[media:Stormode 2016.pdf|2016 Customer meeting]] -->
*Slides from the latest Tech Forum are here: [[media:Techforum 2018_3.pdf|Tech_Forum_2018_3]]
*Slides from the latest Tech Forum are here: [[media:Techforum 2019_2.pdf|Tech_Forum_2019_2]]


<br/>
<br/>
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*'''[[/Introduction to LabAdviser and Processing|Introduction to LabAdviser and Micro/Nano Fabrication]]'''
*'''[[/Introduction to LabAdviser and Processing|Introduction to LabAdviser and Micro/Nano Fabrication]]'''
*'''[[/Introduction to LabManager|Introduction to LabManager]]'''
*'''[[/Introduction to LabManager|Introduction to LabManager]]'''
*'''[[/Process flow approval|Process flow approval]]'''
*'''[[/Process flow approval|Process flow approval]] (fabrication)'''




*'''[[/CEN|Characterization in building 314/307]]
*'''[[/CEN|Characterization in building 314/307]]
*'''[[/314|Characterization in building 314/307 - NEW]]
<!-- *'''[[/314|Characterization in building 314/307 - NEW]] -->
*'''[[Specific Process Knowledge|Micro and Nano Fabrication Overview ]]'''
*'''[[Specific Process Knowledge|Micro and Nano Fabrication Overview ]]'''
*'''[[LabAdviser/Technology Research|Technology Research]]'''
*'''[[LabAdviser/Technology Research|Technology Research]]'''
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*'''[[/New equipment in the pipeline and Old equipment for decommissioning|New equipment in the pipeline]]'''
*'''[[Surveys and statistics|Surveys, statistics, monthly LabAdviser updates and other info.]]'''
*'''[[Surveys and statistics|Surveys, statistics, monthly LabAdviser updates and other info.]]'''
*'''[[How to add information to LabAdviser]]'''
*'''[[How to add information to LabAdviser]]'''
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!Ax2
!Ax2
|At the Lesker
|At the Lesker
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|-
|-
|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!A-5
!A-5
|In the corner near the furnace/plasma asher
|In the corner near the furnace/plasma asher
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!E-5
!E-5/E-4
|By Inclined UV-lamp
|By the MLAs in E-5, by KS aligner in E-4
|55 946
|55 946
|-
|-
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!901
!901
|Injection molder room in the basement
|Injection molder room in the basement
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:LightGrey; color:black"
!314-014
!314-014
|Tecnai T20
|Tecnai T20
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|-
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|-style="background:LightGrey; color:black"
|-style="background:WhiteSmoke; color:black"
!314-032
!314-032
|Prep room
|Prep room

Revision as of 15:12, 17 January 2020

Front page image 20160122.jpg

LabAdviser is a wiki that contains information about

  • equipment at DTU Nanolab that covers micro and nano fabrication in the cleanroom facility in building 346 and surroundings (in building 346 and 347) and characterization equipment, primarily electron microscopy, at building 314 and 307.
  • fabrication steps in micro and nano fabrication that takes place at the cleanroom fabrication facility and surroundings and
  • electron microscopy methods that takes place at building 314/307.

An overview of the equipment in these facilities can be found and some fabrication process flows and singles fabrication steps are described. In general LabAdviser is meant to advise you to the right equipment and to advise you to a good starting point for your micro and nano fabrication steps as for your electron microscopy work. This should not be replacing communication with the staff of the facilities but we recommend it as a good starting point before contacting the staff. To enter LabAdviser you need to log in with your DTU login. LabAdviser is only editable for the staff of the facilities. If you need further information about certain machinery or processes, please contact the relevant staff. Any feedback or input you might have to LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: labadviser@nanolab.dtu.dk


News in LabAdviser:


Contents




Overview of micro and nano fabrication steps - a guide to where you can find fabrication information in LabAdviser:

- - -
Clean your sampleJehanClean.png Dry your sample JehanDry.png Create a thin film on your sample Jehanfilm.png Dope your sample JehanDope.png
Thermal treatment of your sample JehanThermal.png Make a mask on your sampleJehanmask.png Transfer pattern to your sample JehanTransfer.png Define your structure directly Jehandefine.jpg
Bond your samples together JehanBond.png Characterize your sample JehanCharacterize.png Pack your sample JehanPack.png Process flow examples Processflow b.png


Contact Information for the DTU Nanolab fabrication part

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).

Mailbox link Concerning
LabAdviser Mailbox labadviser@nanolab.dtu.dk Any questions or feedback to LabAdviser.
Process flow review process-flow@nanolab.dtu.dk (should work again) More about process flow review here
Training on equipment training@nanolab.dtu.dk It is our goal to answer your request regarding process flow reviews and training within 2 workdays.
E-beam training e-beam@nanolab.dtu.dk To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems.
Please study the material on the EBL Labadviser pages.
E-beam load e-beamload@nanolab.dtu.dk To request cassette loading on JEOL JBX-9500FSZ.
Mask order: Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering here. It requires a specification file like this: (example spec file) and a design file (gds or cif format).

Mask Review

mask@nanolab.dtu.dk (Subject: Mask Review) Note: You have to order masks at Compugraphics via Procure.

Nanolab can offer a check of the mask design and specifications. You can read more about mask design here.

Metal wishes . .

Lesker:

metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes). - See current and future materials here: Lesker status log

Temescal/Wordentec:

metal@nanolab.dtu.dk (Subject:PVD Metal Wishes) See current and future materials here:
  • Temescal
  • For Wordentec you need to contact the thin film group.
Tool change toolchange@nanolab.dtu.dk Laser: change of optics and
Polymer Injection Molding machine: change mold-tool
Commercial offers etc. sales@nanolab.dtu.dk mostly companies nanolabexternal customers
Gas-related questions DCH-Gas@nanolab.dtu.dk issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use
All other inquiries nanolabsupport@nanolab.dtu.dk ... or if you are in doubt


DTU Nanolab Fabrication Cleanroom Naming and Phone Numbers


Cleanroom naming 2017.jpg


Room number Where in the room Phone number
A-1 At III-V RIE 55 804
Ax2 At the Lesker 55 815
A-5 In the corner near the furnace/plasma asher 55 803
B-1 In the corridor 55 806
C-1 At the corridor 55 808
D-1 The entrance room 55 703
D-3 At the KOH 55 940
E-1 By the e-beam computers 55 943
E-5/E-4 By the MLAs in E-5, by KS aligner in E-4 55 946
E-6 Furnace 6" 55 948
F-1 III-V growth 55 949
F-2 Next to Dektak-XTA 55 941
F-3 DUV Stepper 55 947
901 Injection molder room in the basement 55 812


DTU Nanolab building 314 and Phone Numbers


CEN building.jpg



Room number Description Phone number
314-011 QFEG 200 Cryo ESEM 56 406
314-014 Tecnai T20 56 407
314-032 Prep room No phone
314-034 AFEG 250 ESEM 56 414
314-037 Titan ETEM 56 408
314-040 Prep room (Bio) 56 413
314-042 Titan ATEM 56 409
314-060 Nova NanoSEM 600 56 412
314-061 Helios Nanolab 56 411