Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Si etch using AOE

Si mask etch has been tried out by Yunhong Ding @ Fotonik

Parameter	Si_etch
Coil Power [W]	800
Platen Power [W]	30
Platen temperature [oC]	20
C$_{4}$F$_{8}$ flow [sccm]	55
SF$_{6}$ flow [sccm]	75
Pressure [mTorr]	20

Typical results	Resist mask	Resist mask
Si etch rate	~1.12 µm/min tested by Yunhong Ding @fotonik	~1.68 µm/min tested by bge@danchip
Selectivity to photo resist [1:]	~2.6 tested by Yunhong Ding @fotonik	~4 tested by bge@danchip
Etch rate in SiO2	~0.34 µm/min tested by Yunhong Ding @fotonik	0.4 µm/min tested by bge@danchip
Profile [o]	not tested	not tested
Images	.	.
Comments	The profile is supposed to be ~88dg but it has not been confirmed	.