Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon nitride etch with SF6

Nano scale etching of silicon nitride with SF6 plasma

Based on silicon etch recipe made by Henri Jansen.

silicon nitride etch

Parameter	Silicon nitride etch, platen only
SF6 (sccm)	5
Pressure (APC %)	100
Platen power (W)	20
Temperature (oC)	20

• Silicon nitride etch down to Al2O3 with ZEP resist mask (180 nm), 12 min
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