Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon nitride etch with SF6
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Nano scale etching of silicon nitride with SF6 plasma
Based on silicon etch recipe made by Henri Jansen
| Parameter | Recipe 1:Al2O3 etch platen only |
|---|---|
| SF6 (sccm) | 15 |
| Pressure (mTorr) | 5 |
| Platen power (W) | 20 |
| Temperature (oC) | 20 |