Specific Process Knowledge/Characterization/XRD/Process Info/The Principles of X-ray Reflectivity Analysis

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Experimental setup

  • XPS recordings. 10 nm SiC deposited on Si wafer
  • C 1s signal.
    C 1s signal.
  • C 1s signal.
    C 1s signal.

Beam propagation

  • XRR analysis concept.
  • Reflection and transmission from a thin film. Total reflectivity is the sum of the infinite number of reflections.
    Reflection and transmission from a thin film. Total reflectivity is the sum of the infinite number of reflections.

Thickness, roughness and density influence

  • XRR analysis concept.
  • Reflection and transmission from a thin film. Total reflectivity is the sum of the infinite number of reflections.
    Reflection and transmission from a thin film. Total reflectivity is the sum of the infinite number of reflections.
  • Reflection and transmission from a thin film. Total reflectivity is the sum of the infinite number of reflections.
    Reflection and transmission from a thin film. Total reflectivity is the sum of the infinite number of reflections.
  • Reflection and transmission from a thin film. Total reflectivity is the sum of the infinite number of reflections.
    Reflection and transmission from a thin film. Total reflectivity is the sum of the infinite number of reflections.
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