Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest
Request for user exposure slot
As of October 1st 2023 all exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The EBL staff will then assign a user a slot of an appropriate length for the exposure. We will try and group exposure jobs together to minimize cassette changes by loading multiple substrates in a single cassette whenever possible.
The request form can be found here. Please send the request to JEOL-request@nanolab.dtu.dk.
Request form guide
Requests are made per cassette. Hence if you need more than one cassette you will need to submit more than one request form and more than one set of job files.
Date: Please fill in the date of the request.
Username: Please provide your Labmanger username in the username field.
Date and time: Consult the JEOL 9500 booking calendar. Find vacant slots and fill in up to four dates and times that will work for you.
Cassette and window: Select the window(s) you would like to use. You do not need to select a cassette. You can however select a particular cassette if for some reason you have a preference between two (in principle) identical cassettes. If you do select a particular cassette please let us know in the comment field why you need that particular cassette.
Job files: Job files must either be placed on the Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs" or in the regular job folders on the JEOL 9500 computer. If you place the files on the Cleanroom drive please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form.
SDF filename(s): Please provide the name of the SDF files(s).
Prealignment: Please indicate if you need prealignment and hence need additional time for substrate loading.
Request for exposure by Nanolab
At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users.