Specific Process Knowledge/Lithography/EBeamLithography/2D detection system

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In December 2017 we acquired a 2D mark detection system to aid troublesome detection on marks and extend the possibilities on the JEOL E-beam.

This is a short quick guide to operating the 2D mark detection system, the full manual from JEOL (30 pages) can be found here: File:2D mark detecting 20171212.pdf

Getting started

  • you need to make a reference image in the SEM mode, and save as reference

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