Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic
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Revision as of 10:59, 21 February 2008 by BGE (talk | contribs) (→Cleaning of wafers or chips that has been out of the cleanroom.)
Cleaning of wafers or chips that has been out of the cleanroom.
The soap sonic is done in a ultrasonic tank placed in the washbench in the changing room. It is used for wafers or chips that has been out of the cleanroom eg. if they have been diced, and you want to bring them in again for measurement or further processing. The soap sonic clean is not enough, you also have to make a piranha clean. You fill up the tank with DI water and add 20 - 30 drops of Triton x100 soap. Start the sonic and leave for 10 min. rinse, dry and continue with piranha.