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Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride

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< Specific Process Knowledge‎ | Thin film deposition

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At the moment we have one LPCVD furnace for nitride depositions.

A few words about the furnace

The furnace is a Tempress horisontal furnace.

Process Knowledge

Deposition of Silicon Nitride using LPCVD

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