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In December 2017 we acquired a 2D mark detection system to aid troublesome detection on marks and extend the possibilities on the JEOL E-beam.

This is a short quick guide to operating the 2D mark detection system, the full manual from JEOL (30 pages) can be found here: File:2D mark detecting 20171212.pdf

Getting started

you need to make a reference image in the SEM mode, and save as reference

It is importaint to select the condition files with a _ 2D extension like: xna_apy_2D, since some settings are changed so either the 2D detector is used or not!