Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic: Difference between revisions
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'''Feedback to this page''': '''[mailto:wetchemistry@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning/Cleaning_with_Soap_Sonic click here]''' | '''Feedback to this page''': '''[mailto:wetchemistry@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Wafer_cleaning/Cleaning_with_Soap_Sonic click here]''' | ||
==Cleaning of wafers or chips that have been out of the cleanroom | ==Cleaning of wafers or chips that have been out of the cleanroom== | ||
[[Image:Sonic-clean.jpg|300x300px|thumb|Soap sonic clean placed in the wash bench in the changing room. ]] | [[Image:Sonic-clean.jpg|300x300px|thumb|Soap sonic clean placed in the wash bench in the changing room. ]] | ||
The soap sonic is done in a ultrasonic tank placed in the wash bench in the changing room. The soap sonic is DI water with Triton x100 which is free of alkalies. It is used for wafers or chips that has been out of the cleanroom eg. if they have been diced, and you want to bring them in again for measurement or further processing. The soap sonic clean is not enough, you also have to make a piranha clean. | The soap sonic is done in a ultrasonic tank placed in the wash bench in the changing room. The soap sonic is DI water with Triton x100 which is free of alkalies. It is used for wafers or chips that has been out of the cleanroom eg. if they have been diced, and you want to bring them in again for measurement or further processing. The soap sonic clean is not enough, you also have to make a piranha clean. If your samples cannot withstand piranha then you must ask Danchip for special permission to bring in your samples without the piranha. | ||
===Procedure=== | ===Procedure=== | ||
You fill up the tank with DI water and add 20 - 30 drops of Triton x100 soap. Start the sonic and leave for 10 min. rinse, dry and continue with piranha. | You fill up the tank with DI water and add 20 - 30 drops of Triton x100 soap. Start the sonic and leave for 10 min. rinse, dry and continue with piranha. | ||
Revision as of 07:44, 4 April 2016
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Cleaning of wafers or chips that have been out of the cleanroom
The soap sonic is done in a ultrasonic tank placed in the wash bench in the changing room. The soap sonic is DI water with Triton x100 which is free of alkalies. It is used for wafers or chips that has been out of the cleanroom eg. if they have been diced, and you want to bring them in again for measurement or further processing. The soap sonic clean is not enough, you also have to make a piranha clean. If your samples cannot withstand piranha then you must ask Danchip for special permission to bring in your samples without the piranha.
Procedure
You fill up the tank with DI water and add 20 - 30 drops of Triton x100 soap. Start the sonic and leave for 10 min. rinse, dry and continue with piranha.