Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Si etch using AOE: Revision history

28 April 2023

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29 August 2022

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9 August 2022

• curprev 10:3110:31, 9 August 2022‎ Jmli talk contribs‎ 2,783 bytes +40‎ No edit summary

6 April 2020

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3 March 2020

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• curprev 14:0114:01, 3 March 2020‎ Bghe talk contribs‎ 2,645 bytes −3‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:5813:58, 3 March 2020‎ Bghe talk contribs‎ 2,648 bytes −121‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:5713:57, 3 March 2020‎ Bghe talk contribs‎ 2,769 bytes +45‎ →‎Si mask etch (recipe given by SPTS)
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• curprev 13:5513:55, 3 March 2020‎ Bghe talk contribs‎ 2,616 bytes +2‎ →‎Apox2: Si_etch2 7 min (with new resist)
• curprev 13:5413:54, 3 March 2020‎ Bghe talk contribs‎ 2,614 bytes −1‎ →‎=Apox2: Si_etch2 7 min (with new resist)
• curprev 13:5413:54, 3 March 2020‎ Bghe talk contribs‎ 2,615 bytes +42‎ →‎=Apox2: Si_etch2 7 min (with new resist)
• curprev 13:5313:53, 3 March 2020‎ Bghe talk contribs‎ 2,573 bytes +42‎ →‎Apox1: Si_etch2 10 min (with old resist)
• curprev 13:4213:42, 3 March 2020‎ Bghe talk contribs‎ 2,531 bytes +184‎ →‎Apox2: Si_etch2 7 min (with new resist)
• curprev 13:4013:40, 3 March 2020‎ Bghe talk contribs‎ 2,347 bytes +39‎ →‎Apox1: Si_etch2 10 min (with old resist)
• curprev 13:4013:40, 3 March 2020‎ Bghe talk contribs‎ 2,308 bytes +2‎ →‎Profile images for Si_etch2
• curprev 13:3913:39, 3 March 2020‎ Bghe talk contribs‎ 2,306 bytes +139‎ →‎Apox1: Si_etch2 10 min (with old resist)
• curprev 13:3513:35, 3 March 2020‎ Bghe talk contribs‎ 2,167 bytes +196‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:2513:25, 3 March 2020‎ Bghe talk contribs‎ 1,971 bytes +3‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:2413:24, 3 March 2020‎ Bghe talk contribs‎ 1,968 bytes +28‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:2313:23, 3 March 2020‎ Bghe talk contribs‎ 1,940 bytes +45‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:1913:19, 3 March 2020‎ Bghe talk contribs‎ 1,895 bytes +33‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:1813:18, 3 March 2020‎ Bghe talk contribs‎ 1,862 bytes +5‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:1813:18, 3 March 2020‎ Bghe talk contribs‎ 1,857 bytes +27‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:1513:15, 3 March 2020‎ Bghe talk contribs‎ 1,830 bytes +275‎ →‎Si mask etch (recipe given by SPTS)
• curprev 13:0413:04, 3 March 2020‎ Bghe talk contribs‎ 1,555 bytes +93‎ →‎Si mask etch (recipe given by SPTS)

25 November 2019

• curprev 15:4415:44, 25 November 2019‎ Jmli talk contribs‎ 1,462 bytes +4‎ No edit summary

28 January 2019

• curprev 10:0110:01, 28 January 2019‎ Bghe talk contribs‎ 1,458 bytes +23‎ →‎Si mask etch

21 November 2016

• curprev 12:5112:51, 21 November 2016‎ Bghe talk contribs‎ 1,435 bytes +57‎ No edit summary

27 November 2015

• curprev 08:0308:03, 27 November 2015‎ Bghe talk contribs‎ 1,378 bytes +84‎ →‎Si mask etch
• curprev 08:0108:01, 27 November 2015‎ Bghe talk contribs‎ 1,294 bytes −45‎ →‎Si mask etch has been tried out by Yunhong Ding @ Fotonik
• curprev 08:0108:01, 27 November 2015‎ Bghe talk contribs‎ 1,339 bytes +240‎ No edit summary

13 October 2015

• curprev 10:4110:41, 13 October 2015‎ Bghe talk contribs‎ 1,099 bytes +116‎ →‎Si mask etch has been tried out by Yunhong Ding @ Fotonik

1 September 2014

• curprev 10:2610:26, 1 September 2014‎ Bghe talk contribs‎ 983 bytes +13‎ →‎Si mask etch has been tried out by Yunhong Ding @ Fotonik

3 February 2012

• curprev 10:2810:28, 3 February 2012‎ BGE talk contribs‎ 970 bytes +12‎ →‎Si mask etch has been tried out by Yunhong Ding @ Fotonik
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2 February 2012

• curprev 12:4312:43, 2 February 2012‎ BGE talk contribs‎ 959 bytes +162‎ →‎Si mask etch has been tried out by Yunhong Ding @ Fotonik

25 November 2010

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18 November 2010

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16 November 2010

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• curprev 14:1814:18, 16 November 2010‎ BGE talk contribs‎ 735 bytes +72‎ →‎This page is under construction!!!
• curprev 14:1614:16, 16 November 2010‎ BGE talk contribs‎ 663 bytes +663‎ New page: =This page is under construction!!!= Si mask etch has been tried out by Yunhong Ding @ Fotonik {| border="2" cellspacing="2" cellpadding="3" !Parameter !Si_etch |- |Coil Power [W] |800...