Specific Process Knowledge/Thin film deposition/PECVD: Revision history

6 May 2014

• curprev 09:3809:38, 6 May 2014‎ Bghe talk contribs‎ 6,764 bytes +1‎ →‎Process information on PECVD2, PECVD3 (and PECVD1:Expired!)
• curprev 09:3709:37, 6 May 2014‎ Bghe talk contribs‎ 6,763 bytes +72‎ →‎Process information on PECVD2, PECVD3 (and PECVD1:Expired!)
• curprev 09:3609:36, 6 May 2014‎ Bghe talk contribs‎ 6,691 bytes 0‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 09:3609:36, 6 May 2014‎ Bghe talk contribs‎ 6,691 bytes 0‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 09:3509:35, 6 May 2014‎ Bghe talk contribs‎ 6,691 bytes +6‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 09:3509:35, 6 May 2014‎ Bghe talk contribs‎ 6,685 bytes +495‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 09:1009:10, 6 May 2014‎ Bghe talk contribs‎ 6,190 bytes −40‎ →‎Process information on PECVD2, PECVD3 (and PECVD1:Expired!)

27 January 2014

• curprev 13:0313:03, 27 January 2014‎ Bghe talk contribs‎ 6,230 bytes +12‎ →‎Recipes on PECVD2, PECVD3 (and PECVD1:Expired!)
• curprev 13:0113:01, 27 January 2014‎ Bghe talk contribs‎ 6,218 bytes +19‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 12:5712:57, 27 January 2014‎ Bghe talk contribs‎ 6,199 bytes +26‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 12:5512:55, 27 January 2014‎ Bghe talk contribs‎ 6,173 bytes +36‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 12:5212:52, 27 January 2014‎ Bghe talk contribs‎ 6,137 bytes +6‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 12:4812:48, 27 January 2014‎ Bghe talk contribs‎ 6,131 bytes 0‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 12:4612:46, 27 January 2014‎ Bghe talk contribs‎ 6,131 bytes −44‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 12:4312:43, 27 January 2014‎ Bghe talk contribs‎ 6,175 bytes 0‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 12:4212:42, 27 January 2014‎ Bghe talk contribs‎ 6,175 bytes +20‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 12:4112:41, 27 January 2014‎ Bghe talk contribs‎ 6,155 bytes −162‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 12:3812:38, 27 January 2014‎ Bghe talk contribs‎ 6,317 bytes +105‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 12:3512:35, 27 January 2014‎ Bghe talk contribs‎ 6,212 bytes +135‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 12:3212:32, 27 January 2014‎ Bghe talk contribs‎ 6,077 bytes +127‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 12:3012:30, 27 January 2014‎ Bghe talk contribs‎ 5,950 bytes 0‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 12:2412:24, 27 January 2014‎ Bghe talk contribs‎ 5,950 bytes +533‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 12:2112:21, 27 January 2014‎ Bghe talk contribs‎ 5,417 bytes +252‎ →‎Overview of the performance of PECVD thin films and some process related parameters

21 October 2013

• curprev 10:0110:01, 21 October 2013‎ Bghe talk contribs‎ 5,165 bytes +218‎ No edit summary

16 October 2013

• curprev 07:4607:46, 16 October 2013‎ Bghe talk contribs‎ 4,947 bytes +67‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 07:4507:45, 16 October 2013‎ Bghe talk contribs‎ 4,880 bytes +67‎ →‎Recipes on PECVD1(will be removed soon), PECVD2 and PECVD3
• curprev 07:4407:44, 16 October 2013‎ Bghe talk contribs‎ 4,813 bytes +30‎ →‎Recipes on PECVD1 and PECVD3
• curprev 07:4207:42, 16 October 2013‎ Bghe talk contribs‎ 4,783 bytes +29‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 07:4107:41, 16 October 2013‎ Bghe talk contribs‎ 4,754 bytes +1‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 07:4007:40, 16 October 2013‎ Bghe talk contribs‎ 4,753 bytes +98‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

25 October 2010

• curprev 10:5810:58, 25 October 2010‎ Tg talk contribs‎ 4,655 bytes −5‎ No edit summary

7 May 2008

• curprev 14:5414:54, 7 May 2008‎ Jml talk contribs‎ 4,660 bytes +38‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 14:2914:29, 7 May 2008‎ Jml talk contribs‎ 4,622 bytes +4‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 14:2814:28, 7 May 2008‎ Jml talk contribs‎ 4,618 bytes −2,655‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 14:2814:28, 7 May 2008‎ Jml talk contribs‎ 7,273 bytes +2‎ →‎Overview of the performance of PECVD thin films and some process related parameters
• curprev 14:2514:25, 7 May 2008‎ Jml talk contribs‎ 7,271 bytes +2,402‎ No edit summary
• curprev 14:0914:09, 7 May 2008‎ Jml talk contribs‎ 4,869 bytes −16‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters
• curprev 14:0714:07, 7 May 2008‎ Jml talk contribs‎ 4,885 bytes +1‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters

13 December 2007

• curprev 10:5410:54, 13 December 2007‎ 192.38.87.76 talk‎ 4,884 bytes +54‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

4 December 2007

• curprev 15:1415:14, 4 December 2007‎ BGE talk contribs‎ 4,830 bytes +338‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters
• curprev 15:0115:01, 4 December 2007‎ BGE talk contribs‎ 4,492 bytes +238‎ →‎A rough overview of the performance of PECVD thin films and some process related parameters
• curprev 14:5114:51, 4 December 2007‎ BGE talk contribs‎ 4,254 bytes +2,173‎ No edit summary

3 December 2007

• curprev 14:2414:24, 3 December 2007‎ BGE talk contribs‎ 2,081 bytes +224‎ →‎Recipes on PECVD3
• curprev 14:2314:23, 3 December 2007‎ BGE talk contribs‎ 1,857 bytes +276‎ →‎Recipes on PECVD1
• curprev 14:2214:22, 3 December 2007‎ BGE talk contribs‎ 1,581 bytes −52‎ →‎Recipes on PECVD1
• curprev 14:2014:20, 3 December 2007‎ BGE talk contribs‎ 1,633 bytes +274‎ →‎Recipes on PECVD3
• curprev 14:1914:19, 3 December 2007‎ BGE talk contribs‎ 1,359 bytes +273‎ →‎Recipes on PECVD1
• curprev 14:0614:06, 3 December 2007‎ BGE talk contribs‎ 1,086 bytes +123‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition

22 October 2007

• curprev 13:5813:58, 22 October 2007‎ 192.38.87.76 talk‎ 963 bytes +437‎ →‎PECVD Plasma Enhanced Chemical Vapor Deposition
• curprev 13:4413:44, 22 October 2007‎ 192.38.87.76 talk‎ 526 bytes +526‎ New page: ==PECVD Plasma Enhanced Chemical Vapor Deposition== We have three PECVD's here at DANCHIP. They can all be used to deposit Silicon oxides and Silicon nitrides with or without dopants of Bo...