Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch): Revision history

6 December 2007

• curprev 10:1610:16, 6 December 2007‎ BGE talk contribs‎ 2,696 bytes 0‎ →‎Etching using the dry etch technique AOE (Advanced oxide etch)

5 December 2007

• curprev 15:2615:26, 5 December 2007‎ BGE talk contribs‎ 2,696 bytes +32‎ →‎A rough overview of the performance of AOE and some process related parameters
• curprev 15:2115:21, 5 December 2007‎ BGE talk contribs‎ 2,664 bytes −13‎ →‎A rough overview of the performance of AOE and some process related parameters
• curprev 15:1915:19, 5 December 2007‎ BGE talk contribs‎ 2,677 bytes +2,677‎ New page: == Etching using the dry etch technique AOE (Advanced oxide etch) == The AOE positioned at DANCHIP is owned by the company Hymite who is a user of the DANCHIP laboratory. The system is fre...